NEXAFS study on the local structures of DLC thin films formed by Ar cluster ion beam assisted deposition

Abstract

Optical thin film formation by gas-cluster ion beam assisted deposition AIP Conf.Abstract. Near-edge X-ray absorption fine structure (NEXAFS) spectra were measured for the optimization of synthesis conditions on the production of diamond-like carbon (DLC) thin films by the Ar gas cluster ion beam (GCIB) assisted deposition of fullerene. The sp 2 contents of DLC films were estimated from the analysis of the peak corresponding to the transition of the excitation electron from a carbon 1s orbital to a π* orbital in the NEXAFS spectrum of the carbon K-edge over the excitation energy range 275-320 eV. Substrate temperature and Ar cluster ion acceleration voltage in the synthesis conditions of DLC films were optimized to make the sp 2 content minimum.