New ways of looking at masks with the SHARP EUV microscope

Algorithm for extracting multiple object waves without Fourier transform from a single image recorded by spatial frequency-division multiplexing and its application to digital holography

“…Comparing the measured contrast transfer function results presented in Ref. [10] to the simulation results an ideal diffraction limited system (Fig. 12), we find the patterned zoneplate to be operating at the diffraction limit.…”

Field-varying aberration recovery in EUV microscopy using mask roughness

“…Simulations indicate that we are able to recover the aberrations with relative error under 3% with respect to true Zernike coefficient values. These results allow an analysis of the tool performance beyond the experimental demonstration of diffraction-limited imaging [6], using a readily available mask blank.…”

“…Our experiments were done on SHARP [6] at Lawrence Berkeley National Lab, a synchrotron-based full-field EUV microscope, featuring a Fourier synthesis illuminator [7] to steer the illumination angle. The mask blank was coherently illuminated with a central ray angle of 6 • , and imaged using an off-axis Fresnel zoneplate (120 µm diameter, 500 µm focal length, 0.082 NA).…”

Extreme ultraviolet microscope characterization using photomask surface roughness

“…In practice, such microscopes typically limit the quality imaging region to the center 1 to 3 µm. These results allow an analysis of the tool performance beyond the experimental demonstration of diffraction-limited imaging 40 , using a readily available photomask blank.…”