2007
DOI: 10.1111/j.1365-2818.2007.01782.x
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New scintillation detector of backscattered electrons for the low voltage SEM

Abstract: SummaryThe new scintillation detector of backscattered electrons that is capable of working at primary beam energy as low as 0.5 keV is introduced. Low energy backscattered electrons are accelerated in order to generate a sufficient number of photons. Secondary electrons are deflected back by the energy filter so that the true compositional contrast of the specimen is obtained. The theoretical models of the detector function are described and first demonstration images are presented.

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Cited by 3 publications
(2 citation statements)
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“…The main reason for the limited resolution has been lack of appropriate hardware. However, in recent years much progress in SEM technology has been made, especially through improved field emission guns (FEGs), column design and modern detectors, allowing high‐resolution imaging, down to the nanoscale (Jaksch et al ., 2005; Wandrol, 2007). Those improvements mainly affected standard SEM imaging of room‐temperature solid specimens.…”
Section: Introductionmentioning
confidence: 99%
“…The main reason for the limited resolution has been lack of appropriate hardware. However, in recent years much progress in SEM technology has been made, especially through improved field emission guns (FEGs), column design and modern detectors, allowing high‐resolution imaging, down to the nanoscale (Jaksch et al ., 2005; Wandrol, 2007). Those improvements mainly affected standard SEM imaging of room‐temperature solid specimens.…”
Section: Introductionmentioning
confidence: 99%
“…The Everhart-Thornley detector uses a bias on the scintillator to accelerate the electrons to 10 keV (Everhart & Thornley, 1960). Similarly, an additional bias grid in front of the scintillator was proposed for BSE detection (Wandrol, 2007). A grid with additional high voltage is very effective but it adds to the complexity of the detector and the design of the entire sample chamber, and it takes more space.…”
Section: Introductionmentioning
confidence: 99%