“…1 Thus, experimental investigation of electronic spectrum of defect states becomes equally important for physics and applications of low-k insulating films. Deconvolution of the N(E) function from experimentally obtained data requires solution of a one-dimensional integral equation ͑IE͒ of the first kind: e.g., Fredholm's IE appears at the N(E) derivation from field-effect data, 2 Volterra IE links the N(E) curve and spectral dependence of a signal, measured by constant photocurrent method and photothermal deflection spectroscopy, 3 transient photocurrent technique leads to a combination of the Fredholm and Volterra IEs, 4 whereas Mellin IE has to be resolved at the N(E) deconvolution from deep-leveltransient spectroscopy ͑DLTS͒ data, 5 and so on. All such equations are ill-posed in the classical ͑Hadamard͒ sense, 6 when even small ͑of about few per cents͒ errors in the measurements of experimental data can cause huge ͑up to several orders of the magnitude͒ inaccuracy in determination of parameters and shape of the wanted N(E) distribution.…”