2003
DOI: 10.1143/jjap.42.1820
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New Projection Exposure Using a Double-line Matrix of Optical Fibers in Place of a Reticle

Abstract: One of the continuing challenges in cosmology has been to determine the largescale space-time metric from observations with a minimum of assumptions -without, for instance, assuming that the universe is almost Friedmann-Lemaître-Robertson-Walker (FLRW). If we are lucky enough this would be a way of demonstrating that our universe is FLRW, instead of presupposing it or simply showing that the observations are consistent with FLRW. Showing how to do this within the more general spherically symmetric, inhomogeneo… Show more

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Cited by 5 publications
(3 citation statements)
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“…These flexible fabrication techniques aim to avoid hardware-based optical mask sets employed in photolithography. Several approaches substitute reconfigurable computer-controlled illumination systems [1][2][3][4][5] to selectively expose regions of a photoresist, while others employ laser-prototyped adhesivebacked masks to dictate where material is subsequently deposited [6]. Other flexible fabrication methods such as soft lithography [7] and Microfabrica's EFAB [8] use lithographic techniques to create a master 'stamp', or series of masks, which can be used and reused to control material deposition and/or removal.…”
Section: Introductionmentioning
confidence: 99%
“…These flexible fabrication techniques aim to avoid hardware-based optical mask sets employed in photolithography. Several approaches substitute reconfigurable computer-controlled illumination systems [1][2][3][4][5] to selectively expose regions of a photoresist, while others employ laser-prototyped adhesivebacked masks to dictate where material is subsequently deposited [6]. Other flexible fabrication methods such as soft lithography [7] and Microfabrica's EFAB [8] use lithographic techniques to create a master 'stamp', or series of masks, which can be used and reused to control material deposition and/or removal.…”
Section: Introductionmentioning
confidence: 99%
“…For this reason, we previously proposed a new optical projection lithography method using an optical-fiber matrix. 1) In the proposed matrix-exposure method, optical fibers arrayed in a line matrix or a double-line matrix are used in place of reticles. The light supply to each fiber is controlled in accordance with the pattern shapes required, and a wafer or an exposed substrate is relatively scanned to the fiber matrix and the projection lens.…”
Section: Introductionmentioning
confidence: 99%
“…In the previous prototype of our optical-fiber matrixexposure system, mechanical shutters driven by solenoids were used for switching the exposure light. 1) However, some of the solenoid shutters soon broke down, and the reliability was not adequate for practical use. Therefore, in this study, as a countermeasure, light-emitting diodes (LEDs) are fixed at the entrance of each fiber as exposure sources, and the light supply to each fiber is controlled without using mechanical shutters but by switching the LEDs.…”
Section: Introductionmentioning
confidence: 99%