2017
DOI: 10.1016/j.surfcoat.2016.08.067
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New possibilities of plasma immersion ion implantation (PIII) and deposition (PIII&D) in industrial components using metal tube fixtures

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Cited by 17 publications
(6 citation statements)
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“…As an advanced plasma technique, plasma immersion ion implantation and deposition (PIII&D) is a versatile means to modify and functionalize materials surface. As a non-line-of-sight process, it boasts high efficiency and versatility and is particularly useful for samples and industrial components with a complex shape [ 57 , 58 ]. In PIII&D, ion implantation and deposition can be carried out in the same vacuum chamber by varying the sample voltages on the fly, that is, high negative pulsed voltages for ion implantation and low or zero sample biases for deposition.…”
Section: Plasma-activated Interfacesmentioning
confidence: 99%
“…As an advanced plasma technique, plasma immersion ion implantation and deposition (PIII&D) is a versatile means to modify and functionalize materials surface. As a non-line-of-sight process, it boasts high efficiency and versatility and is particularly useful for samples and industrial components with a complex shape [ 57 , 58 ]. In PIII&D, ion implantation and deposition can be carried out in the same vacuum chamber by varying the sample voltages on the fly, that is, high negative pulsed voltages for ion implantation and low or zero sample biases for deposition.…”
Section: Plasma-activated Interfacesmentioning
confidence: 99%
“…The ion implantation method excludes the problem with pure adhesion of coatings on zirconium alloys [26]. PIII is used for treatment of three-dimensional (3-D) work pieces with complex shapes [27,28]. Our previous results [29,30] have shown positive influence of plasma immersion titanium implantation on the hydrogenation behavior into Zr-1Nb and Zr-2.5Nb.…”
Section: Introductionmentioning
confidence: 99%
“…Among these developments are the plasma nitriding method in vacuum oven and ion implantation. Another important process is associated to the use of laser, such as laser carburizing [11][12][13].…”
Section: Introductionmentioning
confidence: 99%