New Multilayer Architectures for Piezoelectric BaTiO<sub>3</sub> Cantilever Systems

Vasta, Giuseppe; Jackson, Trevor; Bowen, James; Tarte, E.J.

doi:10.1557/opl.2011.970

Cited by 3 publications

(3 citation statements)

References 9 publications

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“…In these structures, BaTiO 3 is the piezoelectric layer, Sr RuO 3 acts as an electrode for the OP stacks whilst for the IP stacks, the MgO film is introduced to grow the BaTiO 3 with the polar axis parallel to the surface of the film, and the SrTiO 3 works as buffer layer to improve the interface between the Y Ba 2 Cu 3 O 7 and the MgO film in the IP structure [8].…”

Section: Fabrication and Characterization Of All Oxide Cantileversmentioning

confidence: 99%

Residual stress analysis of all perovskite oxide cantilevers

et al. 2011

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We have used a method to experimentally determine the curvature of thin film multilayers in all oxide cantilevers. This method is applicable for large deflections and enables the radius of curvature of the beam, at a certain distance from the anchor, to be determined accurately. The deflections of the suspended beams are measured at different distances from the anchor point using SEM images and the expression of the deflection curve is calculated for each cantilever. With this expression it is possible to calculate the value of the radius of curvature at the free end of the cantilever. Together with measured values for the Youngs Modulus, this enabled us to determine the residual stress in each cantilever. This analysis has been applied to Sr RuO 3 /BaTiO 3 /Sr RuO 3 , BaTiO 3 /MgO/SrTiO 3 and BaTiO 3 /SrTiO 3 piezoelectric cantilevers and the results compared to two models in which the stresses are determined by lattice parameter mismatch or differences in thermal expansion coefficient. Our analysis shows that the bending of the beams is mainly due the thermal stress generated

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Section: Fabrication and Characterization Of All Oxide Cantileversmentioning

confidence: 99%

Residual stress analysis of all perovskite oxide cantilevers

et al. 2011

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“…Cantilevers in multilayer thin film architectures have been reported by Vasta et al [101]. Figure 53 shows an example of the device made of lead-free piezoelectric materials.…”

Section: Vibration Energy Transfermentioning

confidence: 92%

“…Mechanical energy harvesting can be done through hybrid composite, lead-free materials [95] in linear or nonlinear vibration [88,[96][97][98][99], wind energy [100,101], and locomotion [102]. Efforts have been made to model the efficiency of devices [103].…”

Section: Pb Free Materialsmentioning

confidence: 99%

Energy harvesting: an integrated view of materials, devices and applications

2012

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Energy harvesting refers to the set of processes by which useful energy is captured from waste, environmental, or mechanical sources and is converted into a usable form. The discipline of energy harvesting is a broad topic that includes established methods and materials such as photovoltaics and thermoelectrics, as well as more recent technologies that convert mechanical energy, magnetic energy and waste heat to electricity. This article will review various state-of-the-art materials and devices for direct energy conversion and in particular will include multistep energy conversion approaches. The article will highlight the nano-materials science underlying energy harvesting principles and devices, but also include more traditional bulk processes and devices as appropriate and synergistic. Emphasis is placed on device-design innovations that lead to higher efficiency energy harvesting or conversion technologies ranging from the cm/mm-scale down to MEMS/NEMS (micro- and nano-electromechanical systems) devices. Theoretical studies are reviewed, which address transport properties, crystal chemistry, thermodynamic analysis, energy transfer, system efficiency and device operation. New developments in experimental methods; device design and fabrication; nanostructured materials fabrication; materials properties; and device performance measurement techniques are discussed.

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Electrical properties of BaTiO3 based ferroelectric capacitors grown on oxide sacrificial layers for micro-cantilevers applications

2012

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An investigation of all oxides ferroelectric capacitors based on \(SrRuO_3/BaTiO_3/SrRuO_3\) multi-layers grown on sacrificial oxide layers of \(YBa_2Cu_3O_7\)\ud and MgO for Micro-Electo-Mechanical systems applications is reported. By insertion of additional MgO or \(SrTiO_3\) buffer layers the orientation of the \(BaTiO_3\) film can be controlled allowing the fabrication of suspended cantilevers using the 31 and the 33 piezoelectric modes. The electrical properties of \(SrRuO_3/BaTiO_3/SrRuO_3\) capacitors are changed compared with those grown directly on a single crystal substrate by the introduction of sacrificial layers. Circuit modeling of the electrical characteristics of these devices shows that a reduction of the deposition pressure for \(BaTiO_3\) produces a decrease of the parasitic shunting conductance (modeled with a resistor in parallel to the capacitance of the device) which reduces the resistive loss present in the \(BaTiO_3\) film. However for extremely low deposition pressure the quality of the polarization hysteresis loops is compromised.\ud Particulates present on the surface of the \(YBa_2Cu_3O_7\)increases the parasitic conductance at low frequency in the capacitive structure grown on this sacrificial layer. Good electrical properties are obtained for the capacitive structures grown on top of the MgO sacrificial layers at pressures equal or lower than 8 Pa.\u

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New Multilayer Architectures for Piezoelectric BaTiO₃ Cantilever Systems

Cited by 3 publications

References 9 publications

Residual stress analysis of all perovskite oxide cantilevers

Residual stress analysis of all perovskite oxide cantilevers

Energy harvesting: an integrated view of materials, devices and applications

Electrical properties of BaTiO3 based ferroelectric capacitors grown on oxide sacrificial layers for micro-cantilevers applications

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New Multilayer Architectures for Piezoelectric BaTiO3 Cantilever Systems

Cited by 3 publications

References 9 publications

Residual stress analysis of all perovskite oxide cantilevers

Residual stress analysis of all perovskite oxide cantilevers

Energy harvesting: an integrated view of materials, devices and applications

Electrical properties of BaTiO3 based ferroelectric capacitors grown on oxide sacrificial layers for micro-cantilevers applications

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New Multilayer Architectures for Piezoelectric BaTiO₃ Cantilever Systems