New approach for response surface methodology

Abstract

Modified Response Surface Methodology (MRSM) is proposed for the approximation of numerical simulation results. This approach is based on the parametric statistics methods. The tensor products of Chebyshev's polynomials are used for the non-linear regression series in order to decrease the mean-square error. The MRSM algorithm is realized via Mathematica package. Results of investigations are proved on the basis of numerical simulation of the integrated circuit technology and analysis ofthe experimental data for thin film technology.