Abstract-This paper presents measurement results of alphaparticle-induced soft errors and multiple cell upsets (MCUs) in 65-nm 10T SRAM with a wide range of supply voltage from 1.0 V to 0.3 V. We reveal that the soft error rate (SER) at 0.3 V is eight times higher than SER at 1.0 V, and the ratio of MCUs to the total upsets increases as the supply voltage decreases. The SER and ratio of MCUs with body-biasing are also described. In addition, we investigate an impact of manufacturing variability on the soft error immunity of each memory cell. In our measurement, a distinct influence of manufacturing variability is not observed even in subthreshold region.
I. INTRODUCTIONSubthreshold circuits, which operate at a lower supply voltage than threshold voltage, are expected to be used for ultralow power applications, such as a sensor-node processor [1], [2]. On the other hand, soft error immunity of subthreshold circuits has become a concern because the ultra-low voltage operation reduces the energy required to cause upsets [3], [4]. Especially, the soft error rate (SER) in SRAM, which often characterize the SER of the entire circuit, must be carefully examined before adopting subthreshold circuits for practical applications.According to [5], the neutron-induced SER in SRAM increases by 18% for every 10% reduction in the supply voltage. Reference [6] reports a trend that decrease in the supply voltage makes the alpha-particle-induced SER dominant in SRAM. However, these measurements were just performed between the nominal supply voltage and 0.8 V. As for soft errors in subthreshold region, single event transient (SET) was recently analyzed with ring oscillators in [3]. On the other hand, the SRAM SER in subthreshold region has not been measured as far as the authors know. This paper is the first work to measure the alpha-particleinduced SER in subthreshold region using a newly designed 65-nm 10T SRAM. Measurement results show that 0.3 V operation increases SER eightfold compared to 1.0 V. In addition, information on frequency of multiple cell upsets (MCUs) is important for error prevention using error checking and correction (ECC) technique. In this paper, we also investigate MCUs in subthreshold region. We reveal that although the ratio of MCUs to the total upsets remarkably increases at lower voltage, conventional ECC technique is still effective in our 10T subthreshold SRAM. Additionally, the dependency of SER on body-bias is evaluated, and measurement results indicate that the SER and the ratio of MCUs are less sensitive to the body-bias voltage when the supply voltage is 0.4 V.