In the thesis at hand, ripple pattern formation on amorphous carbon and Si surfaces has been investigated at room temperature during low energy Ne + and Ar + ion irradiation as a function of the ion incidence angle. Monte Carlo simulations of the curvature coefficients applied to the Bradley-Harper and Cater-Vishnyakov models, including the recent extensions predict that pattern formation on amorphous carbon thin films should be possible for low energy Ne + ions from 250 eV up to 1500 eV. Moreover, simulations are able to explain the absence of pattern formation for low energy Ne + ions on Si. Our experimental results are compared with prediction using current linear theoretical models and applying the crater function formalism, as well as Monte Carlo simulations to calculate curvature coefficients using the SDTrimSP program. Calculations indicate that no patterns should be generated up to 45 • incidence angle if the dynamic behavior of the thickness of the ion irradiated layer is taken into account, while pattern formation most pronounced from 50 • for ion energy between 250 eV and 1500 eV, which are in good agreement with our experimental data. Furthermore ripple pattern formation on amorphous carbon films has been investigated during normal incidence ion beam erosion under simultaneous deposition of different metalic co-deposited surfactant atoms. ta-C films were irradiated using 1 keV Ar + ions under continuous deposition of Ti, W, Mo and Pt surfactants. The co-depotion of small amounts Ti, W and Mo leads to the steady state formation of TiC, WC or MoC nanocomposite surface of few nm thickness. This has a tremendous impact on the evolution of nanoscale surface patterns on ta-C. While the surface keeps always flat under co-deposition of Ptatoms, where there is no possibility for phase separation, ripple patterns are observed under co-deposition of Ti-, W-and Mo-atoms. The results confirm that the phase separation is the major driving force for the pattern formation in the case of irradiation with normal incident beam.