NEMS—emerging products and applications of nano-electromechanical systems

Haan, S. de

doi:10.4024/n14ha06.ntp.02.03

Cited by 8 publications

(13 citation statements)

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“…These devices replace bulky actuators and sensors with a micron scale equivalent that can be produced in large quantities by the fabrication process used in integrated circuits. They reduce cost, bulk, weight and power consumption while increasing performance, production volume and functionality by orders of magnitude [21,23].…”

Section: Brief Review On Main Mems and Nems Characteristicsmentioning

confidence: 99%

“…Those can be made at the VLSI scale, possibly co-integrated with CMOS well suited for autonomous, highly sensitive or dense sensors. They include complex gas portable recognition systems, mass spectrometry, or bio-sensors [11,12,13,14] and open several opportunities for integrated solutions in emerging domains as chemical analysis and life science [16,21,22,23,24,30,57,58].…”

Section: Brief Review On Main Mems and Nems Characteristicsmentioning

confidence: 99%

“…Before NEMS devices can actually be industrially implemented, reasonable integrations of carbon-based products must be created [21]. Next, the challenge to overcome is understanding carbon-based materials properties, with which efficient and durable NEMS with low failure rates can be achieved [22,23].…”

Section: Introductionmentioning

confidence: 99%

“…Limiting factors of their implementation are generally a consequence of degraded structure and defects and possible induced phase transformation which are depending on their elaborating device and application environment [23,24]. It then appears necessary to also have all sorts of appropriate characterizing devices, which have to be used for the different process optimization steps.…”

Section: Introductionmentioning

confidence: 99%

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Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can be affected by different kinds of phase transformations and degrading, which greatly depends on the conditions of use and the way the materials have been selected, elaborated, modified and assembled. Distribution of these properties cover several orders of magnitude and depend on the design, actually achieved structure, type and number of defects. It is then essential to be well aware about all these, and to distinguish and characterize all features that are able to affect the results. For this achievement, we point out and discuss the necessity to take into account several recently revisited fundamentals on carbon atomic rearrangement and revised carbon Raman spectroscopy characterizing in addition to several other aspects we will briefly describe. Correctly selected and implemented, these carbon materials can then open new routes for many new and more performing microsystems including improved energy generation, storage and conversion, 2D superconductivity, light switches, light pipes and quantum devices and with new improved sensor and mechanical functions and biomedical applications.

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Section: Brief Review On Main Mems and Nems Characteristicsmentioning

confidence: 99%

Section: Brief Review On Main Mems and Nems Characteristicsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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“…Successful application of metallic glasses in micro-electro-mechanical devices [13, 14] emphasizes the importance of their surface structure and properties. Characteristic sizes of nano-electro-mechanical systems reach nanometer level [15]. Thickness of a natural oxide on a metallic material is usually a few nanometers [16, 17], which becomes significant when a nano-mechanical element size of several tens or even hundreds of nanometer is used.…”

Section: Introductionmentioning

confidence: 99%

Novel electrical transport properties of native Fe-Nb oxide layers leading to unilateral conductivity of a refractory metallic glass

Trifonov

Лубенченко

Ketov

et al. 2019

Heliyon

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Fe-based metallic glasses (also called amorphous alloys) are known to have high hardness and high wear resistance. Here we study and present a Fe-Nb amorphous material with an unusual type of electrical conductivity behavior. The electrical transport properties of Fe-Nb oxide layers were studied by measuring local current-voltage characteristics by the atomic-force microscopy technique. At certain voltage levels the samples containing native oxides showed clearly asymmetrical conductivity relative to polarity of the applied potential. Fe-Nb metallic glassy surface oxide film growth process was monitored at ambient conditions. The growth rate keeps constant during the initial 2.5 hours. After that the growth rate drastically decreases and becomes almost zero while the final oxide thickness is 1.0–1.5 nm. The Fe-Nb film sample annealed for 15 minutes at 300 °C demonstrates several times larger oxide thickness and becomes an insulator. X-ray photoelectron spectroscopy was used to characterize the oxidation states in the surface amorphous oxides. This material can be readily applied as inexpensive nanoscale tunnel diode operating at the commonly utilized voltage of ±5 V.

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The Fiscal Environment of Nanotechnology

Ramsden¹

2018

Applied Nanotechnology

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NEMS—emerging products and applications of nano-electromechanical systems

Cited by 8 publications

References 0 publications

Selective Carbon Material Engineering for Improved MEMS and NEMS

Selective Carbon Material Engineering for Improved MEMS and NEMS

Novel electrical transport properties of native Fe-Nb oxide layers leading to unilateral conductivity of a refractory metallic glass

The Fiscal Environment of Nanotechnology

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