1993
DOI: 10.1007/978-1-4615-2958-3_32
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Nearfield Scanning Acoustic Microscopy

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Cited by 11 publications
(3 citation statements)
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“…The more recent developments of noninvasive tool for subsurface characterization on the basis of multifrequency AFM have led to convincing results for calibration samples (Garcia & Herruzo, 2012) as well as complex systems (Rabe & Arnold, 1994;Cuberes, 2009;Plassard et al, 2011). The majority of these techniques are based on the generation of acoustic modes in the sample coupled with the AFM detection via the cantilever tip (Kulik et al, 1993;Vitry et al, 2015). The challenge is to detect and image of deeply buried structures and features sitting below the surface with lateral resolution lower than 100 nm.…”
Section: Introductionmentioning
confidence: 99%
“…The more recent developments of noninvasive tool for subsurface characterization on the basis of multifrequency AFM have led to convincing results for calibration samples (Garcia & Herruzo, 2012) as well as complex systems (Rabe & Arnold, 1994;Cuberes, 2009;Plassard et al, 2011). The majority of these techniques are based on the generation of acoustic modes in the sample coupled with the AFM detection via the cantilever tip (Kulik et al, 1993;Vitry et al, 2015). The challenge is to detect and image of deeply buried structures and features sitting below the surface with lateral resolution lower than 100 nm.…”
Section: Introductionmentioning
confidence: 99%
“…Since the first works on near-field acoustic microscopy [1][2][3][4][5][6][7][8], different set-ups have been developed showing that the nearfield ultrasonic methods have become an interesting kind of instrumentation for material investigations [9][10][11][12][13]. Most of these systems use a local excitation or detection of acoustic waves at a solid surface with a vibrating tip or sample.…”
Section: Introductionmentioning
confidence: 99%
“…In traditional techniques of near-field acoustics, the tip of a sensor is placed in contact with a solid sample for a transmission of acoustic waves added to the static force leading to a deformation of the sample [1,2]. In noncontact mode, however, a coupling fluid is necessary to transmit the acoustic waves.…”
Section: Introductionmentioning
confidence: 99%