Near-field sub-diffraction photolithography with an elastomeric photomask

Paik, Sangyoon; Kim, Gwangmook; Chang, Sehwan; Lee, Sooun; Jin, Dana; Jeong, Kwang Yong; Lee, I. Sak; Lee, Jekwan; Moon, Hyungsik Roger; Lee, Jaejun; Chang, KyungHi; Choi, Su Seok; Moon, Joonho; Jung, Soon-Shin; Kang, Shinill; Lee, Wooyoung; Choi, Heon Jin; Choi, Hyunyong; Kim, Hyun Jae; Lee, Jae Hyun; Cheon, Jinwoo; Myoung, Jae‐Min; Park, Hong Gyu; Shim, Wooyoung

doi:10.1038/s41467-020-14439-1

Cited by 38 publications

(21 citation statements)

References 58 publications

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“…1 (kr d ). Using the small-argument approximation H (1) 1 (x) ≈ x 2 − j 2 πx we arrive at the same result (6). Note that the real part of this impedance equals the radiation resistance (per unit length) of a radiating current line, as it should.…”

Section: From Power-flow Conformal Anomalous Reflectors To Focusing Mirrorsmentioning

confidence: 58%

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Subwavelength focusing by engineered power-flow conformal metamirrors

Taghvaee

Díaz-Rubio

et al. 2021

Phys. Rev. B

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Many advances in reflective metasurfaces have been made during the last few years, implementing efficient manipulations of wave fronts, especially for plane waves. Despite numerous solutions that have been developed throughout the years, a practical method to obtain subwavelength focusing without the generation of additional undesired scattering is a challenge to this day. In this paper, we introduce and discuss lossless reflectors for focusing incident waves into a point. The solution is based on the so-called power-flow conformal surfaces that allow theoretically arbitrary shaping of reflected waves. The metamirror shape is adapted to the power flow of the sum of the incident and reflected waves, allowing a local description of the reflector surface based on the surface impedance. In particular, we present a study of two scenarios. First, we study the scenario when the field is emitted by a point source and focused at an image point (in the considered example, with the λ/20 resolution). Second, we analyze a metasurface capable of focusing the power of an illuminating plane wave. This work provides a feasible strategy for various applications, including detecting biological signals near the skin, sensitive power focusing for cancer therapy, and point-to-point power transfer.

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Section: From Power-flow Conformal Anomalous Reflectors To Focusing Mirrorsmentioning

confidence: 58%

“…In microscopy, this limit impedes the resolution of imaging roughly around halfwavelength [5]. It also limits the ability to focus waves into a small spot (hot spot), which is important, in particular, for photolithography [6].…”

Section: Introductionmentioning

confidence: 99%

Subwavelength focusing by engineered power-flow conformal metamirrors

Taghvaee

Díaz-Rubio

et al. 2021

Phys. Rev. B

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“…Electrodes in eDEP are generally made of electrically conductive materials, such as silver, brass, and gold. A range of methods, from conventional photolithography [ 62 , 63 ] to the latest 3D metal printing [ 64 , 65 ] technologies, for the fabrication of electrodes. The major drawbacks of using eDEP are Joule heating [ 27 , 31 , 32 , 33 ], fouling effects [ 33 ], and electrochemical reactions that generate toxic species mainly due to electrode disintegration [ 33 , 66 ].…”

Section: Discussionmentioning

confidence: 99%

Insulator Based Dielectrophoresis: Micro, Nano, and Molecular Scale Biological Applications

Benhal

Quashie

Kim

et al. 2020

Sensors

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Insulator based dielectrophoresis (iDEP) is becoming increasingly important in emerging biomolecular applications, including particle purification, fractionation, and separation. Compared to conventional electrode-based dielectrophoresis (eDEP) techniques, iDEP has been demonstrated to have a higher degree of selectivity of biological samples while also being less biologically intrusive. Over the past two decades, substantial technological advances have been made, enabling iDEP to be applied from micro, to nano and molecular scales. Soft particles, including cell organelles, viruses, proteins, and nucleic acids, have been manipulated using iDEP, enabling the exploration of subnanometer biological interactions. Recent investigations using this technique have demonstrated a wide range of applications, including biomarker screening, protein folding analysis, and molecular sensing. Here, we review current state-of-art research on iDEP systems and highlight potential future work.

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“…They are photolithography, UV-lithography, e-beam lithography, soft lithography, scanning probe lithography, and nanolithography [37]. Photolithography is a light-based technique where an image forms on a light projection into the photoresist coated on the substrate (e.g., silicon wafer) [38]. It is widely used technique mainly in the nano-electronics industries to pattern the semiconductors.…”

Section: Lithographymentioning

confidence: 99%

Nanomaterials: Synthesis and Applications in Theranostics

et al. 2021

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Nanomaterials are endowed with unique features and essential properties suitable for employing in the field of nanomedicine. The nanomaterials can be classified as 0D, 1D, 2D, and 3D based on their dimensions. The nanomaterials can be malleable and ductile and they can be drawn into wires and sheets. Examples of nanomaterials are quantum dots (0D), nanorods, nanowires (1D), nanosheets (2D), and nanocubes (3D). These nanomaterials can be synthesized using top-down and bottom-up approaches. The achievements of 0D and 1D nanomaterials are used to detect trace heavy metal (e.g., Pb2+) and have higher sensitivity with the order of five as compared to conventional sensors. The achievements of 2D and 3D nanomaterials are used as diagnostic and therapeutic agents with multifunctional ability in imaging systems such as PET, SPECT, etc. These imaging modalities can be used to track the drug in living tissues. This review comprises the state-of-the-art of the different dimensions of the nanomaterials employed in theranostics. The nanomaterials with different dimensions have unique physicochemical properties that can be utilized for therapy and diagnosis. The multifunctional ability of the nanomaterials can have a distinct advantage that is used in the field of theranostics. Different dimensions of the nanomaterials would have more scope in the field of nanomedicine.

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Near-field sub-diffraction photolithography with an elastomeric photomask

Cited by 38 publications

References 58 publications

Subwavelength focusing by engineered power-flow conformal metamirrors

Subwavelength focusing by engineered power-flow conformal metamirrors

Insulator Based Dielectrophoresis: Micro, Nano, and Molecular Scale Biological Applications

Nanomaterials: Synthesis and Applications in Theranostics

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