Ne⁺ and Ar⁺ ion bombardment‐induced topography on Si

Abstract

The topographic evolution of Si irradiated at room temperature with Ne' and Ar' ions in the energy range 5-40 keV at 45" to the substrate normal has heen studied. Other than isolated etch pits, no topography results from Ne" bombardment at all energies and from Ar' bombardment at 5 and 10 keV. Argon ion bombardment at 20 keV, however, initially produces transverse low-amplitude waves that transform, with increasing erosion, into larger amplitude, corrugated and faceted, wave-like structures. The present data do not conform to existing model predictions but do suggest that light low-energy inert gas ions can be used to inhibit roughening during sputtering erosion.

Changes in the surface morphology induced by 1.0‐MeV Au ion bombardment of Ti and Ti‐6Al‐4V

“…In this figure, the surface ripples are shown to evolve from an initial flat surface to curious ripple structures of smaller dimensions, reminiscent of barchans in sand dunes. Similar structures have been observed in other work on Si at lower energies . As the density of these structures increases, they tend to join together, forming ridges, shown in Fig.…”

“…There is interest in understanding the mechanisms for surface erosion and its evolution. It is known that ion implantation gives the surface a rough texture . In this work, surface changes after ion implantation have been characterized by different surface study techniques.…”

“…It is known that ion implantation gives the surface a rough texture. [10,11] In this work, surface changes after ion implantation have been characterized by different surface study techniques. Additionally, the growth of surface structures and their possible formation mechanisms are also reviewed.…”

Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: understanding the role of shadowing and sputtering

“…As a novelty, we study this transition in the unexplored low ion energy regime which is roughly two orders of magnitude lower than those studied in the aforementioned works [9,12,13,26,27]. In this energy regime, smaller ion penetration depth, ion-mediated amorphization, and sputtering yields may lead to different pattern formation and dynamics.…”

“…Bradley-Harper (B-H) theory and its extensions were invoked to explain ion erosion-induced ripple formation due to off-normal ion bombardment and its coarsening [22,23]. Following these theories, there are reports which show that although ripples are more or less periodic in nature in the linear regime, with increasing time, it may change to a sawtooth-like morphology [9,12,13]. This type of transition from ripples to sawtooth or faceted structures was mentioned by Makeev and Barabasi for small surface gradients [24,25] which was later generalized by Carter at intermediate ion energies (few tens of kiloelectron volts) for all surface gradients [26].…”