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In this work the formation of optical channel waveguides in Nd:YAG crystals by either proton or carbon implantation is reported. The channel waveguides were obtained by a single implantation process through an electroformed mask of nickel-cobalt alloy. Experimental measurements of the optical properties of these waveguides are presented.

The performance of CW Nd:YAG waveguide lasers operating at 1.06 microm at room temperature is described. The waveguides were fabricated by proton implantation and the main differences in the process of fabrication were the angle of implantation and the total dose implanted. The characterization of the waveguide refractive index profile induced by proton implantation and the main laser characteristics i.e., slope efficiency and threshold are presented.