“…The principle of the light emission is the thermal excitation of nano-sized conductive paths, i.e., nano-resistors, formed from the breakdown of the highk dielectric stack (12). Furthermore, the broad-band light can be narrowed down to a specific wavelength after coating with a thin film filter, which is a suitable light source for the on-chip optical interconnect (13,14). In addition, the light emission from this kind of device can be enhanced by embedding with a layer of nanocrystals, e.g., nc-ZnO, nc-CdSe, and WOx, in the ZrHfO dielectric (6,11,12,15).…”