Proceedings of International Conference on Microelectronic Test Structures
DOI: 10.1109/icmts.1996.535614
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Narrow width effects in CMOS n(p)-well resistors

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“…T HE ELECTRICAL behavior of integrated (diffused and ion-implanted) resistors depends nonlinearly on geometry, temperature and bias [1]- [3]. The temperature dependence is caused by the change with temperature both of mobility and of the built-in potential, and hence depletion width, of the junction between the resistor body and the tub or substrate.…”
Section: Introductionmentioning
confidence: 99%
“…T HE ELECTRICAL behavior of integrated (diffused and ion-implanted) resistors depends nonlinearly on geometry, temperature and bias [1]- [3]. The temperature dependence is caused by the change with temperature both of mobility and of the built-in potential, and hence depletion width, of the junction between the resistor body and the tub or substrate.…”
Section: Introductionmentioning
confidence: 99%