Nanotechnologies for Fabrication of Devices in Piezoengineering, Micro- and Nanoelectronics

Abstract

not Available.

Electroless Metallization of Nano-Sized Particles, Composites Fabrication

“…It was justified that the electroless deposition of Ni-P and Ni-B alloys could be successfully used in piezoengineering, microelectronics and so on (1)(2)(3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20). For development of the optimum technology, we improved the entire cycle of the metallization process: the preliminary treatment of various substrates (sensitization and activation), the composition of solutions and the parameters of electroless deposition, the parameters of heat treatment after deposition, the conditions of photolithography, the selective etching processes, etc.…”

“…The advantages of electroless deposition of metals and alloys are the following: a possibility of obtaining the coating of uniform thickness on arbitrary shaped-surfaces, good solderability, sufficient chemical resistance, high hardness and wear resistance, a possibility of varying the mechanical properties and electrical conductivity of the films in a wide range. Hence, this opens up new avenues for wide application of electrolessly deposited films (1)(2)(3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20).…”

Electroless Deposition of Metals and Alloys for Micropelectronics, Nanoelectronics, Piezoengineering and Composites Fabrication

“…For development of the optimum technology, we improved the entire cycle of the metallization process: the preliminary treatment of various substrates (sensitization and activation), the composition of solutions and the parameters of electroless deposition, the parameters of heat treatment after deposition, the conditions of photolithography, the selective etching processes, etc. (1)(2)(3)(4)(5)8,(20)(21)(22)(23)(24)(27)(28)(29)(30)(31)(32)(33).…”

“…A new method of production of precise piezoelectric quartz resonators and filters, and monolithic piezoquartz filters with electrodes made of electroless nickel-phosphorous alloys for spacecraft, hydroacoustics and communication devices was developed (1)(2)(3)(4)(5)8,(20)(21)(22)(23)(24)27,29).…”

“…As a result, Au, Ag and Pd were adequately replaced with non-precious metals, usage of toxic substances was eliminated and the technology was significantly simplified. Several hundred million devices in the microelectronic and piezoengineering industry were produced (1)(2)(3)(4)(5)8,(20)(21)(22)(23)(24)(27)(28)(29)(30)(31)(32)(33).…”