2009
DOI: 10.1364/oe.17.002500
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Nanostructuring of organic-inorganic hybrid materials for distributed feedback laser resonators by two-photon polymerization

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Cited by 30 publications
(18 citation statements)
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“…For organic hosts that are not UV photosensitive conventional optical photolithography in combination with reactive ion etching (RIE) is a potential patterning route [63,64]. Other micro-and nano-structuring methods employed include electron beam lithography [64][65][66][67][68] laser interference ablation [69,70], two-photon polymerization [71] and the pen-drawing technique [72]. In Figs.…”
Section: Methods For Structuring Of Rib Waveguides and Diffractive Rementioning
confidence: 99%
“…For organic hosts that are not UV photosensitive conventional optical photolithography in combination with reactive ion etching (RIE) is a potential patterning route [63,64]. Other micro-and nano-structuring methods employed include electron beam lithography [64][65][66][67][68] laser interference ablation [69,70], two-photon polymerization [71] and the pen-drawing technique [72]. In Figs.…”
Section: Methods For Structuring Of Rib Waveguides and Diffractive Rementioning
confidence: 99%
“…1(d)], which is afterwards locally polymerized by 2PP-DLW using a setup described earlier [15]. The polymerization was induced by a focused femtosecond laser (Coherent Mira 900D titanium:sapphire laser).…”
Section: Hybrid Lithographymentioning
confidence: 99%
“…In some of them, relief gratings have been prepared over the substrate by holographic lithography [5,6], electron beam lithography (EBL) [7,8], laser interference lithography [8] or nanoimprint lithography (NIL) [9][10][11], and then the active film was deposited on top of them by spincasting [5], spin-coating [6,7,[9][10][11] or horizontal-dipping coating [8]. In other works direct patterning of the DFB structure on the active medium by UV laser interference ablation [12], two photon polymerization [13], or NIL [7,[14][15][16] processes have been performed. Among all these fabrication methods, NIL is one of the most promising technologies due to its high throughput, low-cost and high fidelity pattern transfer [17,18].…”
Section: -Introductionmentioning
confidence: 99%