2009
DOI: 10.2478/s11534-009-0026-8
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Nanostructuring of diamond films using self-assembled nanoparticles

Abstract: Abstract:We report the use of gold, nickel and diamond nanoparticles as a masking material for realization of diamond nano-structures by applying the dry plasma etching process. Applying low power plasma (100 W) in a gas mixture of CF 4 /O 2 for 5 minutes results in a formation of three different types of diamond nanostructures, depending on the mask type material and particle size. Using of the Ni mask results in realization of diamond nano-rods, applying of the Au mask brings cauliflower-like structures, and… Show more

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Cited by 14 publications
(7 citation statements)
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References 15 publications
(29 reference statements)
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“…Therefore, the surface morphology looked less covered with clearly pre‐defined structures. A detailed study on the formation of diamond nanostructures by the plasma etching process, can be found in our previous work 12.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, the surface morphology looked less covered with clearly pre‐defined structures. A detailed study on the formation of diamond nanostructures by the plasma etching process, can be found in our previous work 12.…”
Section: Resultsmentioning
confidence: 99%
“…To note, the thermal treatment of the thin metal layers was also realized in microwave plasma (H2, 500 °C for 10 min, Figure 1b). This treatment resulted in the formation of nano-sized metal droplets on diamond surface [9]. In the case of thermo-catalytically driven reactions, the processing of samples with Ni droplets were performed in the same microwave plasma system using different process parameters (H2, ~1000 °C for 30 min to 2 h, Figure 1d).…”
Section: Methodsmentioning
confidence: 99%
“…This treatment resulted in the formation of nano-sized metal droplets on diamond surface [15]. The formed metal droplets were used as the masking material during the capacitively coupled plasma reactive ion etching (CCP-RIE) in 40 % of CF 4 in O 2 for 10 min at 0.12 mbar and 100 W [27].…”
Section: Fabrication Of Diamond Nanorodsmentioning
confidence: 99%