Nanostructured Transparent Conductive Electrodes for Applications in Harsh Environments Fabricated via Nanosecond Laser‐Induced Periodic Surface Structures (LIPSS) in Indium–Tin Oxide Films on Glass

Reinhardt, Hendrik; Maier, Philipp; Kim, Hee Cheol; Rhinow, Daniel; Hampp, Norbert

doi:10.1002/admi.201900401

Cited by 9 publications

(9 citation statements)

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“…This could be achieved by varying the laser processing settings, such as laser wavelength, incidence angle and fluence. For example, recently, the LIPSS with periodicities up to 175 nm were produced by using a nanosecond pulsed laser operating at 532 nm wavelength [61]. Since, the geometry, dimensions and periodicity of LIPSS can be tailored in the sub-micron range scale using the laser processing parameters, further studies will be focused on anti-biofouling characteristics of such topographies against both gram-positive and gram-negative bacteria of different shapes and dimensions.…”

Section: Discussionmentioning

confidence: 99%

Anti-Biofouling Properties of Femtosecond Laser-Induced Submicron Topographies on Elastomeric Surfaces

et al. 2020

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Where a licence is displayed above, please note the terms and conditions of the licence govern your use of this document.When citing, please reference the published version. Take down policyWhile the University of Birmingham exercises care and attention in making items available there are rare occasions when an item has been uploaded in error or has been deemed to be commercially or otherwise sensitive.

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Section: Discussionmentioning

confidence: 99%

Anti-Biofouling Properties of Femtosecond Laser-Induced Submicron Topographies on Elastomeric Surfaces

et al. 2020

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“…[25] LSF-LIPSS formation upon nanosecond-laser pulsed irradiation has also been recently reported at 532 nm. [26] Such a rich phenomenology further spans when considering the interaction of the laser with initially amorphous ITO films [27] where amorphous-crystalline, ⊥ HSF-LIPSS have been observed.…”

Section: Introductionmentioning

confidence: 99%

Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organization

López‐Santos

Puerto

Siegel

et al. 2020

Advanced Optical Materials

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emitting diodes, flat panel displays, etc.) and energy harvesting (photovoltaics, low emissivity coatings, etc.). [1] They are produced by creating electron degeneracy in a wide bandgap oxide either introducing non-stoichiometry (solid solutions) and/ or appropriate dopants, like Sb or F. [2] This is usually achieved in mixtures of different Group III oxides with metal oxides where the metal can be a part of the semiconductor oxide or act as dopant. This leads to different families of TCOs including AZO (aluminum zinc oxide), IZO (indium zinc oxide), ITO (indium tin oxide), GZO (gallium zinc oxide), and so on. Among them ITO (typically ≈90% wt% In 2 O 3 + 10 wt% SnO 2) plays a key role, especially to produce transparent conductive electrodes (TCEs) in flat-panel displays. Regarding the structuring of ITO films, although wet chemical etching is suitable for producing micron-width electrodes, the need for rapid, and mask-less patterning of large areas led to investigation of the use of laser structuring already in the late 90s. [3] A similarly important application of lasers for processing TCOs is their use for sintering spin-coated films formed by nanoparticles, especially on flexible substrates. [4-6] However, the peculiarities of its absorption spectrum and the regular use of transparent substrates impose limitations in Highly anisotropic resistivity surfaces are produced in indium tin oxide (ITO) films by nanoscale self-organization upon irradiation with a fs-laser beam operating at 1030 nm. Anisotropy is caused by the formation of laser-induced periodic surface structures (LIPSS) extended over cm-sized regions. Two types of optimized structures are observed. At high fluence, nearly complete ablation at the valleys of the LIPSS and strong ablation at their ridges lead to an insulating structure in the direction transverse to the LIPSS and conductive in the longitudinal one. A strong diminution of In content in the remaining material is then observed, leading to a longitudinal resistivity ρ L ≈ 1.0 Ω•cm. At a lower fluence, the material at the LIPSS ridges remains essentially unmodified while partial ablation is observed at the valleys. The structures show a longitudinal conductivity two times higher than the transverse one, and a resistivity similar to that of the pristine ITO film (ρ ≈ 5 × 10 −4 Ω•cm). A thorough characterization of these transparent structures is presented and discussed. The compositional changes induced as laser pulses accumulate, condition the LIPSS evolution and thus the result of the structuring process. Strategies to further improve the achieved anisotropic resistivity results are also provided.

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“…While for ITO films with a thickness of 600 nm, the laser fluence required for processing LSFLs was higher than 1.0 J/cm 2 at a scanning velocity of 3 mm/s. The heat accumulation during laser processing was very serious, which resulted in irregular LSFLs [ 5 , 52 , 53 , 68 ]. ITO film with a thickness of 175 nm was suitable for processing LSFLs with extreme regularity.…”

Section: Resultsmentioning

confidence: 99%

“…Nanostructures fabricated on the ITO film can effectively modulate its electric and optical properties, especially surface resistance and optical transmittance [ 10 , 16 , 41 , 47 , 48 , 49 , 50 , 51 ], and can be used for application in film solar cells and OLED devices. Reinhardt et al enhanced the robustness of an ITO film in a severe environment (i.e., strong acid) by fabricating LIPSS with a nanosecond laser, and the incorporation of silicon into ITO is considered to be the reason for the robustness of this sub-pattern against acidic environments [ 52 ]. Liu et al reported that LIPSSs were processed on ITO film by picosecond laser, which ensured low resistance and improved IR transmittance [ 53 ].…”

Section: Introductionmentioning

confidence: 99%

Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens

et al. 2022

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Regular laser-induced periodic surface structures (LIPSS) were efficiently fabricated on indium tin oxide (ITO) films by femtosecond laser direct writing with a cylindrical lens. It was found that randomly distributed nanoparticles and high spatial frequency LIPSSs (HSFL) formed on the surface after a small number of cumulative incident laser pulses per spot, and regular low spatial frequency LIPSSs (LSFL) appeared when more laser pulses accumulated. The mechanism of the transition was studied by real-time absorptance measurement and theoretical simulation. Results show that the interference between incident laser and surface plasmon polaritons (SPPs) excited by random surface scatterers facilitates the formation of prototype LSFLs, which in turn enhances light absorption and SPP excitation following laser pulses. The effects of scanning velocity and laser fluence on LSFL quality were discussed in detail. Moreover, large-area extremely regular LSFL with a diameter of 30 mm were efficiently fabricated on an ITO film by femtosecond laser direct writing with the cylindrical lens. The fabricated LSFLs on the ITO film demonstrate vivid structural color. During LSFL processing, the decrease of ITO film thickness leads to the increase of near-infrared optical transmittance.

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Nanostructured Transparent Conductive Electrodes for Applications in Harsh Environments Fabricated via Nanosecond Laser‐Induced Periodic Surface Structures (LIPSS) in Indium–Tin Oxide Films on Glass

Cited by 9 publications

References 50 publications

Anti-Biofouling Properties of Femtosecond Laser-Induced Submicron Topographies on Elastomeric Surfaces

Anti-Biofouling Properties of Femtosecond Laser-Induced Submicron Topographies on Elastomeric Surfaces

Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organization

Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens

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