Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens

Chen, Long; Yang, Jian; Jiang, Qilin; Cao, Kaiqiang; Liu, Jukun; Jia, Tianqing; Sun, Zhenrong; Xu, Hongqi

doi:10.3390/ma15155092

Cited by 4 publications

(2 citation statements)

References 68 publications

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“…Figure 12 shows that extremely high-quality LSFL covered the entire lotus pattern. In a dark background and under illumination by an LED light source, the lotus pattern showed excellent purity and bright color [40][41][42].…”

Section: Laser Fluence and Scanning Velocitymentioning

confidence: 99%

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry–Perot Cavity

Jiang

Zhang

et al. 2023

Nanomaterials

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This study developed a novel frequency-doubled Fabry–Perot cavity method based on a femtosecond laser of 1030 nm, 190 fs, 1 mJ, and 1 kHz. The time interval (60–1000 ps) and attenuation ratio (0.5–0.9) between adjacent sub-pulses of the 515 nm pulse train were able to be easily adjusted, while the efficiency was up to 50% and remained unchanged. Extremely high-quality low-spatial-frequency LIPSS (LSFL) was efficiently fabricated on an indium tin oxide (ITO) film using a pulse train with a time interval of 150 ps and attenuation ratio of 0.9 focused with a cylindrical lens. Compared with the LSFL induced by the primary Gaussian pulse, the uniformity of the LSFL period was enhanced from 481 ± 41 nm to 435 ± 8 nm, the divergence of structural orientation angle was reduced from 15.6° to 3.7°, and the depth was enhanced from 74.21 ± 14.35 nm to 150.6 ± 8.63 nm. The average line edge roughness and line height roughness were only 7.34 nm and 2.06 nm, respectively. The depths and roughness values were close to or exceeded those of resist lines made by the interference lithography. Compared with the common Fabry–Perot cavity, the laser energy efficiency of the pulse trains and manufacturing efficiency were enhanced by factors of 19 and 25. A very colorful “lotus” pattern with a size of 30×28 mm2 was demonstrated, which was covered with high-quality LSFLs fabricated by a pulse train with optimized laser parameters. Pulse trains can efficiently enhance and prolong the excitation of surface plasmon polaritons, inhibit deposition particles, depress ablation residual heat and thermal shock waves, and eliminate high-spatial-frequency LIPSS formed on LSFL, therefore, producing extremely high-quality LSFL on ITO films.

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Section: Laser Fluence and Scanning Velocitymentioning

confidence: 99%

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry–Perot Cavity

Jiang

Zhang

et al. 2023

Nanomaterials

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“…For example, Zhang et al used 1 kHz laser pulses provided by a Ti:Sa system to generate LIPSS on Cu and Ni for wetting applications at scanning speeds of 2–4 mm/s, increasing the processing efficiency by about a factor of ten when using a cylindrical lens with respect to a spherical one [ 26 ]. More recently, Chen et al used a similar approach for the elaboration of LIPSS on a glass coated with an Indium Tin Oxide film, improving the processing efficiency by more than 2 orders of magnitude with respect to that achieved with a spherical lens in the same experimental conditions [ 27 ].…”

Section: Introductionmentioning

confidence: 99%

Periodic Surface Structuring of Copper with Spherical and Cylindrical Lenses

Nivas

D’Andrea

et al. 2023

Nanomaterials

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The use of a cylindrical lens in femtosecond laser surface structuring is receiving attention to improve the processing efficiency. Here, we investigate the structures produced on a copper target, in air, by exploiting both spherical and cylindrical lenses for beam focusing, aiming at elucidating similarities and differences of the two approaches. The morphological features of the surface structures generated by ≈180 fs laser pulses at 1030 nm over areas of 8 × 8 mm2 were analyzed. For the spherical lens, micron-sized parallel channels are formed on the target surface, which is covered by subwavelength ripples and nanoparticles. Instead, the cylindrical lens leads to a surface decorated with ripples and nanoparticles with a negligible presence of micro-channels. Moreover, the morphological features achieved by focusing ≈180 fs laser pulses at 515 nm with the cylindrical lens and varying the scanning parameters were also studied. The experimental results evidence a direct effect of the hatch distance used in the scanning process on the target surface that contains dark and bright bands corresponding to regions where the rippled surface contains a richer decoration or a negligible redeposition of nanoparticles. Our findings can be of interest in large area surface structuring for the selection of the more appropriate focusing configuration according to the final application of the structured surface.

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Regulation of laser-induced nanogratings by tuning the Marangoni-plasmon-coupled effect

Xu,

Huang,

Zhou

et al. 2024

Opt. Lett.

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Laser-induced subwavelength nanogratings on films find widespread applications in enhancing a spectrum through surface plasmon excitation. It is challenging to achieve high uniformity, diversity, and controllability due to the intricate interplay between two basic mechanisms in laser nanostructuring: the Marangoni effect and surface plasmon polaritons (SPPs). We tune the coupled effect on Ge2Sb2Te5 films by adjusting the laser polarization, whose component controls the two effects’ strength ratio. The Marangoni effect dominates when the SPPs’ direction mismatches with the growing direction of nanogratings. Tuning this competition relationship helps to create nanogratings with tunable duty cycle and distribution, which are significant for light modulation applications. A highly efficient direct writing method with a line-shaped laser beam is employed to create large-area regular nanogratings by enhancing the effect tuning. We demonstrate diverse Au nanogratings with the aid of a lift-off operation and apply them in surface plasmon-coupled emission (SPCE), showcasing exceptional enhancement and narrowing performance.

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Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens

Cited by 4 publications

References 68 publications

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry–Perot Cavity

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry–Perot Cavity

Periodic Surface Structuring of Copper with Spherical and Cylindrical Lenses

Regulation of laser-induced nanogratings by tuning the Marangoni-plasmon-coupled effect

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