2006
DOI: 10.1063/1.2402877
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Nanostructured magnetic Fe–Ni–Co/Teflon multilayers for high-frequency applications in the gigahertz range

Abstract: Thin multilayer films of sputtered polytetrafluoroethylene (Teflon) and Fe54Ni27Co19 with different layer thicknesses were prepared by vapor-phase tandem deposition. The films show ferromagnetic resonance frequencies from 3.0to4.7GHz and a high-frequency permeability in the range from 100 to 175, while having negligible losses up to 700MHz and a quality factor Q up to 12 at 1GHz. Thus these films could be promising candidates as high-frequency components used, for example, in mobile communication electronics.

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Cited by 73 publications
(38 citation statements)
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“…[23,24,53,54] This combines rf magnetron sputtering of selected polymers from a polymer target and dc REVIEW sputtering from a metal or alloy target. For magnetic metals, rf sputtering is also used.…”
Section: Evaporationmentioning
confidence: 99%
See 1 more Smart Citation
“…[23,24,53,54] This combines rf magnetron sputtering of selected polymers from a polymer target and dc REVIEW sputtering from a metal or alloy target. For magnetic metals, rf sputtering is also used.…”
Section: Evaporationmentioning
confidence: 99%
“…For magnetic metals, rf sputtering is also used. [53] The resulting polymer matrix is crosslinked, which is often advantageous and may, in particular, improve the mechanical properties compared to the original polymer. We also investigated sputtering from polymer-metal composite targets but the approach turned out to have some drawbacks compared to sputtering from separate targets.…”
Section: Evaporationmentioning
confidence: 99%
“…For magnetic metals, rf sputtering is also used [22]. The resulting polymer matrix is crosslinked, which is often advantageous and may especially improve the mechanical properties compared to the original polymer.…”
Section: Vapor Phase Co-depositionmentioning
confidence: 99%
“…Our approach is very attractive for development of high-frequency (up to > 1 GHz) soft-magnetic materials [22] which would be readily integrable in monolithic microwave integrated circuit (MMIC) devices. Eddy currents, one of the main loss mechanisms determining the cut-off frequency of inductor materials, can be effectively suppressed by embedding magnetic nanoparticles in a dielectric matrix.…”
Section: Magnetic Nanocomposites (A) Magnetic Core Materials For Highmentioning
confidence: 99%
“…11 Among these approaches, the multilayer method is considered the promising route because of its easy fabrication. For instance, Beach et al 12 researchers selected the SiO 2 13 and polytetrafluoroethylene (PTFE) 14 as interlayer materials to fabricate a multilayer structure. Various insulating materials including native oxides such as iron oxide, oxide ceramic and polymers could be used as an interlayer to suppress the PMA and control the high-frequency magnetic properties.…”
Section: Introductionmentioning
confidence: 99%