“…Recently, our FEM Maxwell solver (JCMsuite) has been applied for various tasks in optics design. Among these are the design of microstructured fibers, 6,7 solar cells, 8 microlithography masks, 9 integrated microlenses, 10 metamaterials, 11 microcavities, 12,13 plasmonic waveguides, 14 scatterometry reference standards, 15 and others. 16 Here, we discuss a method for improvement of numerical performance, so-called hp-FEM.…”