Nanostructure optimization of Zr-W-Ti metallic glass thin films via multitarget co-sputtering with oblique angle deposition approach

Kowong, Rattanachai; Denchitcharoen, Somyod; Lertvanithphol, Tossaporn; Triamnak, Narit; Chananonnawathorn, Chanunthorn; Jaruwongrungsee, Kata; Klamchuen, Annop; Muthitamongkol, Pennapa; Phae-ngam, Wuttichai; Nakajima, Hideki; Songsiriritthigul, Prayoon; Horprathum, Mati

doi:10.1016/j.jallcom.2021.161265

Cited by 10 publications

(3 citation statements)

References 44 publications

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“…It is well-known that the glancing angle (α w ) between the substrate normal and incident vapor flux plays an important role in the porosity of the OAD film, owing to a geometrical shadowing effect. 37 The porosity of the OAD film is enhanced with the increase of the glancing angle and the shadow area. We have prepared three kinds of OAD films under varied glancing angles (65−86°); a high glancing angle of 86°contributes to a high gas response (Figure S4), which probably arises from the large surface area in the presence of abundant nanopores (2−5 nm, Figure S3c), benefiting for gas/oxide charge interaction via offering plenty of adsorption sites.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…The morphology of the WO 3 dense film and annealed OAD WO 3 was examined by field-emission scanning electron microscopy (FE-SEM) (Figures b,c and S3d–g); uniformly aligned columnar nanorods could be obtained. It is well-known that the glancing angle (α w ) between the substrate normal and incident vapor flux plays an important role in the porosity of the OAD film, owing to a geometrical shadowing effect . The porosity of the OAD film is enhanced with the increase of the glancing angle and the shadow area.…”

Section: Results and Discussionmentioning

confidence: 99%

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Prompt Electronic Discrimination of Gas Molecules by Self-Heating Temperature Modulation

Li,

Chananonnawathorn,

Pan

et al. 2023

ACS Sens.

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Though considerable progress has been achieved on gas molecule recognition by electronic nose (e-nose) comprised of nonselective (metal oxide) semiconductor chemiresistors, extracting adequate molecular features within short time (<1 s) remains a big obstacle, which hinders the emerging e-nose applications in lethal or explosive gas warning. Herein, by virtue of the ultrafast (∼20 μs) thermal relaxation time of self-heated WO 3 -based chemiresistors fabricated via oblique angle deposition, instead of external heating, self-heating temperature modulation has been proposed to generate sufficient electrical response features. Accurate discrimination of 12 gases (including 3 xylene isomers with the same function group and molecular weight) has been readily achieved within 0.5−1 s, which is one order faster than the state-of-the-art e-noses. A smart wireless e-nose, capable of instantaneously discriminating target gas in ambient air background, has been developed, paving the way for the practical applications of e-nose in the area of homeland security and public health.

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Section: ■ Results and Discussionmentioning

confidence: 99%

Section: Results and Discussionmentioning

confidence: 99%

Prompt Electronic Discrimination of Gas Molecules by Self-Heating Temperature Modulation

Li,

Chananonnawathorn,

Pan

et al. 2023

ACS Sens.

Self Cite

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“…Metallic glass thin films (MGTFs) have garnered significant attention owing to their remarkable properties, including high elastic limit, excellent wear resistance, and superior hardness [1][2][3][4][5]. The distinctive combination of chemical and mechanical properties in MGTFs renders them exceptionally well-suited for utilization in micro-engineering systems.…”

Section: Introductionmentioning

confidence: 99%

Annealing-induced changes in wear resistance and nanomechanical properties of CuZr metallic glass thin films

Gao,

He,

Rathan

et al. 2023

Mater. Res. Express

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Over recent years, metallic glass thin films (MGTFs) have found extensive applications in advanced micro-engineering systems. Consequently, there is a need to thoroughly assess the nanomechanical and tribological behaviors of MGTFs to optimize the design of efficient components. In this study, we employed the nanoindentation technique in various modes to investigate the elastic heterogeneity, tribological response, and mechanical properties of CuZr amorphous films. Before conducting the mechanical tests, annealing treatments at 500 K and 600 K were performed to create samples with different stored energies. The thermal history analysis revealed that the annealing process reduced the stored energy in the microstructure. Furthermore, the pre-annealing treatment resulted in increased hardness and Young's modulus of the thin films. Additionally, higher annealing temperatures significantly improved the wear resistance of the MGTFs. Observing the serration dynamics in the scratching test, we noticed that the annealing treatment induced larger shear bands on the wear track side. Moreover, the increase in annealing temperature led to a reduction in elastic heterogeneity, which was consistent with the enthalpy relaxation values in the samples. This suggests that the annealing temperature enhanced the densely packed atomic structure, leading to the stabilization of the thin films.

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Effect of RF sputtering parameters on the nanoscratch properties of quinary Ti-Zr-Cu-Ni-Al thin film metallic glass

Paremmal

Karati

Das

et al. 2022

Journal of Alloys and Compounds

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Nanostructure optimization of Zr-W-Ti metallic glass thin films via multitarget co-sputtering with oblique angle deposition approach

Cited by 10 publications

References 44 publications

Prompt Electronic Discrimination of Gas Molecules by Self-Heating Temperature Modulation

Prompt Electronic Discrimination of Gas Molecules by Self-Heating Temperature Modulation

Annealing-induced changes in wear resistance and nanomechanical properties of CuZr metallic glass thin films

Effect of RF sputtering parameters on the nanoscratch properties of quinary Ti-Zr-Cu-Ni-Al thin film metallic glass

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