Effect of RF sputtering parameters on the nanoscratch properties of quinary Ti-Zr-Cu-Ni-Al thin film metallic glass

Paremmal, Priyesh; Karati, Anirudha; Das, Ritu; Seshadri, Ravi; Raghothaman, H.; Loganathan, S.; Rao, M. S. Ramachandra; Dash, K.

doi:10.1016/j.jallcom.2022.164615

Cited by 6 publications

(4 citation statements)

References 42 publications

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“…The surface morphology of the ZrCuAlNi layers has been investigated by SEM crosssections (see Figure 9), and the results suggest that it is strongly affected by the RF power during the sputtering process. It is well known that sputter-deposited film exhibits characteristic columnar growth [77], and in the SEM cross-section images, the changing morphology of the film with RF power can be clearly observed. In the SEM cross-section image of the amorphous ZrCuAlNi thin-film metallic glass, a columnar nanostructured morphology is observed at 125 W. Interestingly, at 75 W and 100 W, the formation of non-column grains and the presence of small equiaxed grains (<5 nm) are evident.…”

Section: Fe-sem Surface Morphology and Nanostructure Observationmentioning

confidence: 97%

Section: Fe-sem Surface Morphology and Nanostructure Observationmentioning

confidence: 99%

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Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films

Nguyen,

Dang,

Lin

et al. 2023

Nanomaterials

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Zirconium-based metallic glass films are promising materials for nanoelectronic and biomedical applications, but their mechanical behavior under different conditions is not well understood. This study investigates the effects of radio frequency (RF) power and test temperature on the nanostructure, morphology, and creep behavior of Zr55Cu30Al10Ni5 metallic glass films prepared by RF magnetron sputtering. The films were characterized by X-ray diffraction and microscopy, and their mechanical properties were measured by a bulge test system. The results show that the films were amorphous and exhibited a transition from noncolumnar to columnar morphology as the RF power increased from 75 W to 125 W. The columnar morphology reduced the creep resistance, Young’s modulus, residual stress, and hardness of the films. The creep behavior of the films was also influenced by the test temperature, with higher temperature leading to higher creep strain and lower creep stress. The findings of this study provide insights into the optimization of the sputtering parameters and the design of zirconium-based metallic glass films for various applications.

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Section: Fe-sem Surface Morphology and Nanostructure Observationmentioning

confidence: 97%

Section: Fe-sem Surface Morphology and Nanostructure Observationmentioning

confidence: 99%

Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films

Nguyen,

Dang,

Lin

et al. 2023

Nanomaterials

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“…In thermal evaporation techniques, ejection of atoms will occur by heating the source to the melting temperature. When an energetic particle, which may be a neutral atom or an ion or a molecule with sufficient energy hit the surface of the target and sputtering occurs [539]. The energy of the hitting particle transfers its energy to the atom on the surface of the target ending in impinging near-surface or surface atoms.…”

Section: Pulsed Laser Depositionmentioning

confidence: 99%

“…And the atoms those overcome the inherent binding energy of the target as a result of multiatom kinetic collision are called sputter atoms and the deposition of these sputter atoms on a surface is known as sputter deposition. The two types sputtering technologies that are widely used are DC sputtering (uses DC power source) and RF sputtering [539] (uses AC power source) [532]. After performing standard cleaning procedures, ScN films were sputter coated on Al 2 O 3 substrates by DC magnetron sputtering mechanism under Ar/N 2 atmosphere with the Sc target and their thermoelectric properties were analyzed [540].…”

Section: Pulsed Laser Depositionmentioning

confidence: 99%

Physics and technology of thermoelectric materials and devices

Dadhich

Saminathan

Kumari

et al. 2023

J. Phys. D: Appl. Phys.

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The continuous depletion of fossil fuels and the increasing demand for eco-friendly and sustainable energy sources have prompted researchers to look for alternative energy sources. The loss of thermal energy in heat engines (100-350 ºC), coal-based thermal plants (150-700 ºC), heated water pumping in the geothermal process (150-700 ºC), and burning of petrol in the automobiles (150-250 ºC) in form of untapped waste-heat can be directly and/or reversibly converted into usable electricity by means of charge carriers (electrons or holes) as moving fluids using thermoelectric (TE) technology, which works based on typical Seebeck effect. The enhancement in TE conversion efficiency has been a key challenge because of the coupled relation between thermal and electrical transport of charge carriers in a given material. In this review, we have deliberated the physical concepts governing the materials to device performance as well as key challenges for enhancing the TE performance. Moreover, the role of crystal structure in the form of chemical bonding, crystal symmetry, order-disorder and phase transition on charge carrier transport in the material has been explored. Further, this review has also emphasized some insights on various approaches employed recently to improve the TE performance, such as, (i). carrier engineering via band engineering, low dimensional effects, and energy filtering effects and (ii). Phonon engineering via doping/alloying, nano-structuring, embedding secondary phases in the matrix and microstructural engineering. Wehave also briefed the importance of magnetic elements on thermoelectric properties of the selected materials and spin Seebeck effect. Furthermore, the design and fabrication of TE modules and their major challenges are also discussed. As, thermoelectric figure of merit, zT does not have any theoretical limitation, an ideal high performance thermoelectric device should consist of low-cost, eco-friendly, efficient, n- or p-type materials that operate at wide- temperature range and similar coefficients of thermal expansion, suitable contact materials, less electrical/ thermal losses and constant source of thermal energy. Overall, this review provides the recent physical concepts adopted and fabrication procedures of TE materials and device so as to improve the fundamental understanding and to develop a promising TE device.

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Tribological Properties Assessment of Metallic Glasses Through a Genetic Algorithm-Optimized Machine Learning Model

Rahardja,

Sari,

Alsalamy

et al. 2023

Met. Mater. Int.

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Effect of RF sputtering parameters on the nanoscratch properties of quinary Ti-Zr-Cu-Ni-Al thin film metallic glass

Cited by 6 publications

References 42 publications

Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films

Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films

Physics and technology of thermoelectric materials and devices

Tribological Properties Assessment of Metallic Glasses Through a Genetic Algorithm-Optimized Machine Learning Model

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