Nanoscale three dimensional pattern formation in light emitting porous silicon

Chun, Ik Su; Chow, Edmond; Li, Xiuling

doi:10.1063/1.2924311

Cited by 33 publications

(35 citation statements)

References 16 publications

(26 reference statements)

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“…MacEtch of silicon refers to the wet etching of silicon in the presence of noble metal particles or films, which are physically or chemically deposited onto the silicon surface to enhance silicon etching at open‐circuit potential (OCP) in oxidizing hydrofluoric acid (HF) aqueous solutions. [ 35–157 ] Within the last couple of years, MacEtch of silicon in HF aqueous solutions has aroused great interest in the research community and is presently one of the most popular top‐down approached for micro/nanofabrication owing to its cost‐effectiveness, simplicity, versatility, and scalability. [ …”

Section: Origin Mechanism and Development Of Metal‐assisted Chemicamentioning

confidence: 99%

Metal‐Assisted Chemical Etching of Silicon in Oxidizing HF Solutions: Origin, Mechanism, Development, and Black Silicon Solar Cell Application

Huo

Wang

et al. 2020

Adv Funct Materials

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Metal-assisted chemical etching (MacEtch) of silicon in oxidizing hydrofluoric acid (HF) solutions has emerged as a prominent top-down micro/nanofabrication approach for a wide variety of silicon micro/nanostructures. The popularity of the process is due to its simplicity, rapidity, versatility, and scalability. In recent years, there has been a surge of interest in developing MacEtch silicon micro/nanostructures for advanced energy conversion and storage applications, such as photovoltaic devices, thermoelectric devices, lithiumion rechargeable batteries, and supercapacitors. Particularly, MacEtch has emerged as a powerful surface micro/nanostructuring method for low-cost and scalable production of commercial black silicon (b-Si) with excellent light trapping properties. This review on MacEtch processing of silicon in oxidizing HF solutions provides a critical description of its history and origin including how it evolved into what it is today, the understanding of its mechanism and important technical advances in the field. As regards MacEtch-fabricated b-Si, its initial discovery and further improvements to its large-scale deployment in silicon photovoltaic industry are traced. Some fundamental challenges and perspectives in this exciting field are also discussed.

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Section: Origin Mechanism and Development Of Metal‐assisted Chemicamentioning

confidence: 99%

Metal‐Assisted Chemical Etching of Silicon in Oxidizing HF Solutions: Origin, Mechanism, Development, and Black Silicon Solar Cell Application

Huo

Wang

et al. 2020

Adv Funct Materials

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“…This concept provides a strategy for local formation of PSi by means of selectively depositing catalyst metal to silicon surface and then performed chemical etching. 114,121,122 Li et al 114 prepared PSi protein microarrays by combining metal-assisted chemical etching and photolithography process. They compared this method with automatic spotting on a homogenous PSi surface, which is a commonly used method to produce protein microarrays, and found the former presented a homogenous microarray image with a clean background, while the spotted surface was disordered and had more non-specic adsorption on the background.…”

Section: With Permission Frommentioning

confidence: 99%

Functionalised porous silicon as a biosensor: emphasis on monitoring cells in vivo and in vitro

Gupta

Zhu

Guan

et al. 2013

Analyst

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Porous silicon photonics is the ideal platform for high sensitivity, high selectivity monitoring of biological molecules in a complex fluidic environment. The potential of this technology was identified almost 15 years ago, however, it has taken considerable advances in porous silicon surface chemistry, photonics, and micro-fabrication to create truly effective devices that can provide new insights into the behaviour of biological systems. In this review we provide a critical assessment of the development of porous silicon optical biosensors from the early demonstrations of affinity based sensing to the current trends in monitoring single cell activity and perspectives in the use of photonic microparticles for biomedical applications.

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“…The rolled-up microtubes can be made porous by depositing Au on the rolled-up tubes and immersing them in a metal-assisted chemical etching (MacEtch) solution [25,[31][32][33][34]. Shown in Fig.…”

Section: Rolling-up Patterned Strained Membranes To Form Holey or Nanmentioning

confidence: 99%

Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties

Li¹

2011

Adv. Opt. Photon.

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Nanoscale three dimensional pattern formation in light emitting porous silicon

Cited by 33 publications

References 16 publications

Metal‐Assisted Chemical Etching of Silicon in Oxidizing HF Solutions: Origin, Mechanism, Development, and Black Silicon Solar Cell Application

Metal‐Assisted Chemical Etching of Silicon in Oxidizing HF Solutions: Origin, Mechanism, Development, and Black Silicon Solar Cell Application

Functionalised porous silicon as a biosensor: emphasis on monitoring cells in vivo and in vitro

Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties

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