2023
DOI: 10.1039/d3nr00343d
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Nanoscale temperature sensing of electronic devices with calibrated scanning thermal microscopy

Abstract: Heat dissipation threatens the performance and lifetime of many electronic devices. As the size of the devices shrink to the nanoscale, we require spatially and thermally resolved thermometry to observe...

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Cited by 5 publications
(8 citation statements)
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“…To probe the amount and variation of the thermal background noise, a scan with zero bias current was always performed prior to the first biased SThM scan and after the last. To be noted, the thermal signal measured from SThM could not be directly related to the surface temperature without certain calibration steps, [ 28 ] but served as a qualitative indication of the currents flowing in the bridges.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…To probe the amount and variation of the thermal background noise, a scan with zero bias current was always performed prior to the first biased SThM scan and after the last. To be noted, the thermal signal measured from SThM could not be directly related to the surface temperature without certain calibration steps, [ 28 ] but served as a qualitative indication of the currents flowing in the bridges.…”
Section: Methodsmentioning
confidence: 99%
“…[25] SThM uses a special thermo-resistive probe with high thermal sensitivity that enables the characterization of thermal phenomena on the sample surface with nanoscale spatial resolution. [26][27][28] For our VO 2 bridges, the local heating generated is directly linked to the current flow, due to Joule heating. [17,29]…”
Section: Introductionmentioning
confidence: 99%
“…We operated the SThM in sensing mode using a probe power of 19 μW, which, as determined in a prior study, is optimum for measuring under sensing conditions. 35 In that mode, we kept the probe at a low self-heating temperature while achieving a high temperature sensitivity. For the conversion of the SThM Wheatstone bridge voltage signal (mV) into temperature, we calibrated the system as described in ref 35.…”
Section: Device Thermal Characterization (Scanning Thermal Microscopy)mentioning
confidence: 99%
“…35 In that mode, we kept the probe at a low self-heating temperature while achieving a high temperature sensitivity. For the conversion of the SThM Wheatstone bridge voltage signal (mV) into temperature, we calibrated the system as described in ref 35.…”
Section: Device Thermal Characterization (Scanning Thermal Microscopy)mentioning
confidence: 99%
See 1 more Smart Citation