“…In this study, GaN films were grown using molecular beam epitaxy (MBE) on two different substrates, ZnO and sapphire. Atomic force microscopy (AFM), conducting atomic force microscopy (CAFM) (Chen, Hou, Hsieh, Chang, & Chen, ; Chen et al, ; Lin, Chen, Perng, & Chen, ; Yu et al, ), and scanning surface potential microscopy (SSPM) (Chen, ; Chen et al, ) were utilized to integrally study and analyse the differences in surface structure, contact current distribution, and work function (WF) distribution of the films. Differences in these microphysical characteristics could seriously affect the function and efficiency of GaN‐based components because they may result in the redistribution of the charges inside the GaN semiconductor, which form the built‐in electric field, while the quantum‐confined Stark effect could accelerate charge accumulation.…”