Nanoscale patterning of graphene through femtosecond laser ablation

Şahin, Ramazan; Şimşek, Ergün; Aktürk, Selçuk

doi:10.1063/1.4864616

Cited by 114 publications

(81 citation statements)

References 18 publications

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“…Previously it has been shown that femtosecond (Kalita et al 2011, Sahin et al 2014 and nanosecond (Kiisk et al 2013) pulsed lasers can ablate graphene. In this paper we expand on this previous work towards actual device fabrication and electrical characterization, and compare different wavelengths (355 nm, 532 nm and 1064 nm) of picosecond lasers to determine the optimal compromise between full laser ablation of graphene and avoidance of damage to the underlying SiO 2 substrate.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of CVD graphene-based devices via laser ablation for wafer-scale characterization

et al. 2015

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Selective laser ablation of a wafer-scale graphene film is shown to provide flexible, high speed (1 wafer/hour) device fabrication while avoiding the degradation of electrical properties associated with traditional lithographic methods. Picosecond laser pulses with single pulse peak fluences of 140 mJ cm −2 for 1064 nm, 40 mJ cm −2 for 532 nm, and 30 mJ cm −2 for 355 nm are sufficient to ablate the graphene film, while the ablation onset for Si/SiO 2 (thicknesses 500 μm/302 nm) did not occur until 240 mJ cm −2 , 150 mJ cm −2 , and 135 mJ cm −2 , respectively, allowing all wavelengths to be used for graphene ablation without detectable substrate damage. Optical microscopy and Raman Spectroscopy were used to assess the ablation of graphene, while stylus profilometery indicated that the SiO 2 substrate was undamaged. CVD graphene devices were electrically characterized and showed comparable field-effect mobility, doping level, on-off ratio, and conductance minimum before and after laser ablation fabrication.

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Section: Introductionmentioning

confidence: 99%

Fabrication of CVD graphene-based devices via laser ablation for wafer-scale characterization

et al. 2015

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“…To the best of our knowledge, we present here for the first time a low-cost dry method to fabricate coplanar interdigitated electrodes based on single-layer graphene. The presented dry fabrication method introduces features such as reliability, amenability, upward scalability, and low cost, which are attractive advantages with respect to other techniques conventionally used to define patterns on graphene, that present drawbacks comprising graphene under-etching and contamination from the contacting mask (mask lithography), [37] undesirable presence of residual polymers that contaminate the graphene surface (photolithography), [38] low fabrication yield and harmful effects on atomically thick graphene layers (laser cutting), [39,40] and complex and costly techniques, incompatible with plastic substrates (laser scribing and helium ion microscopy). [38,39] …”

Section: Fabrication Of Graphene-based Transparent Touch-sensitive Layermentioning

confidence: 99%

Energy‐Autonomous, Flexible, and Transparent Tactile Skin

García-Núñez

Navaraj

Polat

et al. 2017

Adv Funct Materials

270

190

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such as diabetes. To satisfy the requirements of such a system, active materials with intrinsic properties, including good mechanical, electrical, optical, and structural properties, are in high demand. [1] The development of suitable flexible pressure sensors for e-skin applications has been a challenge, due to inadequate flexibility, conductivity, large-area manufacturability, and reliable and repeatable performance of the structure, to be applicable in practical robots. [7] In this regard, only very few approaches have been successfully employed in actual robots. [7,8] Further, making the e-skin transparent adds an extra dimension in the functional design space of e-skin, as it enables incorporating photovoltaic (PV)-energy harvesting, electro/thermochromicity, chameleon effect, etc. Along with a new generation of flexible and stretchable solar cells, [9] this will allow fabrication of energy-autonomous, stretchable e-skins. Accordingly, a novel approach is explored in this work, of a vertical-layered-stack structure consisting of a photovoltaic cell attached to the back plane of a transparent tactile skin; where skin transparency is a crucial feature that allows light to pass through, making the building block unique and opening a new, promising line of energy-autonomous devices for flexible electronics. In this regard, graphene is a promising material as it offers key parameters to develop nonplanar, transparent electronic or tactile skin. It has been shown that graphene has a good combination of stiffness (≈1000 GPa) and tensile strength (≈100 GPa). [10] Together with its sunlight blindness [11] and good electrical conductivity, [12] graphene has also emerged as a viable candidate for various flexible, transparent electronic and optoelectronic devices. [13][14][15][16] Moreover, in our recent work, we demonstrated that high-quality graphene can be synthesized and transferred on large area, flexible substrates (400 cm 2 ) with a very low-cost and easy fabrication process. [15] Owing to the intrinsic properties and advances in the synthesis and fabrication of devices, graphene is also a promising candidate for the development of high-performance e-skin, requiring large area device fabrication on nonplanar surfaces.A few flexible pressure sensors reported in literature, based on capacitive, [17][18][19][20] piezoelectric, [21] and piezoresistive sensing mechanisms, [2,[22][23][24][25][26][27][28] use graphene as an active material. Piezoresistive sensors transduce the pressure imposed on the sensor's active area in terms of resistance change, and offer an attractive solution for pressure sensing due to advantages such as low cost and easy signal collection. Graphene-based piezoresistive pressure sensors have been reported in various configurations. For example, Yao et al. demonstrated the fabrication of flexible pressure sensors based on a graphene nanosheet on Energy-Autonomous, Flexible, and Transparent Tactile SkinCarlos García Núñez, William Taube Navaraj, Emre O. Polat, and Ravinder Dahiya* Tactile or el...

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“…There is an intensive effort on the use of lasers of different energies, from the infrared to the ultraviolet, and different time scales, from continuous to femto-second lasers [19] to pattern graphene and graphene oxide materials [20,21,22]. Lasers are being used either to induce the partial reduction of graphene oxide films providing paths of increased conductivity and particularly well suited for applications in batteries and supercapacitors [2,3], or to eliminate graphene [23,24]. Recently, a soft lithography-based approach has been used over square millimeter areas [25].…”

mentioning

confidence: 99%

Large area graphene and graphene oxide patterning and nanographene fabrication by one-step lithography

Climent‐Pascual

García-Vélez

Álvarez

et al. 2015

Carbon

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Nanoscale patterning of graphene through femtosecond laser ablation

Abstract: Articles you may be interested inPlasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in waterThe role of asymmetric excitation in self-organized nanostructure formation upon femtosecond laser ablation AIP Conf.

Cited by 114 publications

References 18 publications

Fabrication of CVD graphene-based devices via laser ablation for wafer-scale characterization

Fabrication of CVD graphene-based devices via laser ablation for wafer-scale characterization

Energy‐Autonomous, Flexible, and Transparent Tactile Skin

Large area graphene and graphene oxide patterning and nanographene fabrication by one-step lithography

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