Nanoscale displacement sensing using microfabricated variable-inductance planar coils

Coşkun, M. Bulut; Thotahewa, Kasun Maduranga Silva; Ying, York-Sing; Yuce, Mehmet Rasit; Neild, Adrian; Alan, Tuncay

doi:10.1063/1.4823828

Cited by 24 publications

(10 citation statements)

References 13 publications

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“…resolution, accuracy or miniaturization, they have superior performance and hence are widely used in harsh working environments [7]- [14], for that inductive techniques are less affected by undesired matter like water, dust, or oil, and usually use symmetrical structure to cancel electromagnetic noise [15], [16]. Recent inductive sensors trend to use printed circuit board (PCB) [17] or other technologies [18], [19] to lower sensor cost, improve compactness, etc. References [15], [20], and [21] introduce three types of inductive sensors, an absolute linear position sensor, an absolute angular position sensor and an incremental angle sensor, which are all based on PCB technology.…”

Section: Introductionmentioning

confidence: 99%

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

Tang

Peng

et al. 2015

IEEE Sensors J.

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This paper introduces a noncontact, low-cost, and reliable inductive sensor for angular displacement measurement. It is suitable to work in harsh industrial environments. The sensor has simple structure consisting of three key parts: 1) a ferromagnetic stator, which is a pure plane; 2) a ferromagnetic rotor, which has face slots; and 3) four layers of planar copper coils, including primary and secondary coils. Primary coils are supplied with two orthogonal 4000-Hz ac, and secondary coils output a signal whose phase is proportional to angular displacement. Primary coils are designed with sinusoidal shape, so that magnetic field between the stator and rotor has approximately sinusoidal distribution, and finally linearity between the phase variation of output signal and angular displacement is well helped by this design. The structure and working principles of the sensor are explained in detail. Moreover, a sensor model was simulated to verify the feasibility of the sensor working principles and a sensor prototype was designed for actual experiment. At last actual experiment results are given and analyzed, showing that the sensor prototype has achieved accuracy better than ±12 arcsec in the range of 0°-360°, and this kind of sensor may have a better performance by improving the layout of primary coils and front-end signal-process circuit.Index Terms-Non-contact inductive sensor, angular displacement, planar coils, contrate rotor, sinusoidal shape.

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Section: Introductionmentioning

confidence: 99%

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

Tang

Peng

et al. 2015

IEEE Sensors J.

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“…The FM configuration that uses oscillator-based reactance sensors detects the frequency shifts introduced by the capacitance or inductance changes of the sensor front-ends [28]- [37]. These configurations present the advantage of having lower phase, flicker, and white noises at higher frequencies [27]- [29].…”

Section: Introductionmentioning

confidence: 99%

“…The ring oscillator [34], [36] based FM circuit is also studied extensively for the interface of capacitive sensors, such as a capacitive pressure sensor [34] and a humidity sensor [36]. For the interface of inductive sensor, Colpitts oscillator topology is adopted to measure nanoscale displacement as a frequency shift in [37]. An integrated complementary crossed-coupled oscillator with on chip LC resonator is investigated in [28], [30] for magnetically labeled biosensors and is able to provide highly stable and lower phase noise output frequency.…”

Section: Introductionmentioning

confidence: 99%

A MEMS Interface IC With Low-Power and Wide-Range Frequency-to-Voltage Converter for Biomedical Applications

Redouté

Yuce

2016

IEEE Trans. Biomed. Circuits Syst.

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This paper presents an interface circuit for capacitive and inductive MEMS biosensors using an oscillator and a charge pump based frequency-to-voltage converter. Frequency modulation using a differential crossed coupled oscillator is adopted to sense capacitive and inductive changes. The frequency-to-voltage converter is designed with a negative feedback system and external controlling parameters to adjust the sensitivity, dynamic range, and nominal point for the measurement. The sensitivity of the frequency-to-voltage converter is from 13.28 to 35.96 mV/MHz depending on external voltage and charging current. The sensitivity ranges of the capacitive and inductive interface circuit are 17.08 to 54.4 mV/pF and 32.11 to 82.88 mV/mH, respectively. A capacitive MEMS based pH sensor is also connected with the interface circuit to measure the high acidic gastric acid throughout the digestive tract. The sensitivity for pH from 1 to 3 is 191.4 mV/pH with 550 μV(pp) noise. The readout circuit is designed and fabricated using the UMC 0.18 μm CMOS technology. It occupies an area of 0.18 mm (2) and consumes 11.8 mW.

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“…and pressure measurement applications [22], same as capacitive sensors. Moreover, ECSs are immune to environmental contaminations.…”

Section: Introductionmentioning

confidence: 99%

A Compact and High-Performance Eddy-Current Sensor Based on Meander-Spiral Coil

Wang

Feng

2015

IEEE Trans. Magn.

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In this paper, a novel meander-spiral coil (MSC) was designed as an eddy-current sensor (ECS) probe, which has small sensing area and spot size, nearly no limitation of mounting space, and can perform better than the regular-spiral coil (RSC). The results of the finite-element analysis show that the MSC has a magnetic active area that was only a quarter of that of the RSC. The MSC has much smaller inductance and resistance than the RSC, though the former has high sensitivity similar to the latter. These types of spiral coils were manufactured by printed circuit board technology and tested, which proves that the MSC has a small sensing range. Owing to MSC's small magnetic active area and high performance, this type of spiral coil is suitable for applications in sensor arrays and micro-electromechanical systems. Furthermore, using the MSC, ECSs have the potential to be used for micro-gap measurement, accelerometers, and pressure measurement applications, as in the case of capacitive sensors. Moreover, ECSs are inherently immune to environmental contaminations.Index Terms-Displacement measurement, eddy currents, inductance, magnetic fields, sensor systems.

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Nanoscale displacement sensing using microfabricated variable-inductance planar coils

Cited by 24 publications

References 13 publications

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

A MEMS Interface IC With Low-Power and Wide-Range Frequency-to-Voltage Converter for Biomedical Applications

A Compact and High-Performance Eddy-Current Sensor Based on Meander-Spiral Coil

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