Nanorobot-Based Handling and Transfer of Individual Silicon Nanowires

Fatikow, Sergej; Bartenwerfer, Malte

doi:10.4018/ijimr.2012040103

Cited by 5 publications

(1 citation statement)

References 26 publications

(29 reference statements)

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“…The pickup and bend processes of one-dimensional zinc oxide material under the experimental platform are carried out successfully. Bartenwerfer and Fatikow (2012) implemented the technique of autofocusing in nano-operation and successfully performed experiments on picking up CNT and placing it on the substrate. Ru et al (2010) developed an SEM operating platform, which is capable of coordinating four operating units that can perform complex testing and operational tasks.…”

Section: Introductionmentioning

confidence: 99%

Simulation and fabrication of carbon nanotube–nanoparticle interconnected structures

Liu²,

Ding

et al. 2021

Mech. Sci.

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Abstract. With the rapid development of nanotechnology, the size of a device reaches sub-nanometer scale. The larger resistivity of interconnect leads to serious overheating of integrated circuits. Silicon-based electronic devices have also reached the physical limits of their development. The use of carbon nanotubes instead of traditional wires has become a new solution for connecting nano-structures. Nanocluster particles serving as brazing material play an important role in stabilizing the connection of carbon nanotubes, which places higher demands for nanoscale manipulation techniques. In this paper, the dynamic processes under different operating scenarios were simulated and analyzed, including probe propulsion nanoparticle operation, probe pickup nanoparticle operation and probe pickup nanocluster particle operation. Then, the SEM (Scanning Electron Microscope) was used for nanoparticle manipulation experiments. The smallest unit of carbon nanotube wire was obtained by three-dimensional (3D) construction of a carbon nanotube–silver nanocluster particle (CN-AgNP), which verified the feasibility of 3D manipulation of carbon nanotube wire construction. The experiments on the construction of carbon nanotube–nanocluster particle structures in three-dimensional operation were completed, and the smallest unit of carbon nanotube wire was constructed. This nano-fabrication technology will provide an efficient and mature technical means in the field of nano-interconnection.

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Section: Introductionmentioning

confidence: 99%

Simulation and fabrication of carbon nanotube–nanoparticle interconnected structures

Liu²,

Ding

et al. 2021

Mech. Sci.

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Carbon nanotubes pickup by van der Waals force based on nanorobotics manipulation inside SEM

Yang

Chen

Wang

et al. 2016

Micro & Nano Letters

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A method of picking up carbon nanotubes (CNTs) from nanotube bulk by van der Waals force inside a scanning electron microscopy is presented. An atomic force microscope cantilever was employed as end effector of nanorobotics manipulators for CNT picking up. A manipulation strategy was established by analysing the van der Waals force of three different types of contacting models. Three groups of experiments were designed and carried out to investigate the effects of different factors. Factors including pickup angle, pickup contact area between the CNT and the cantilever and pickup speed of the end effector were discussed. The results shown that a pickup angle at 90.1°and a pickup speed lower than 10 nm/step with a pickup contact length more than 1.5 µm would increase the probability of picking up CNT successfully.

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