Nanopatterning using a simple bi-layer lift-off process for the fabrication of a photonic crystal nanostructure

Mao, An; Schaper, Charles D.; Karlicek, R. F.

doi:10.1088/0957-4484/24/8/085302

Cited by 11 publications

(6 citation statements)

References 15 publications

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“…To fabricate the bottom electrodes on borosilicate glass, the simple and standard lift-off process 51 was used (details are omitted here). The sidewall electrodes were micro-milled using a Mini-Mill/GX CNC machine (Mini Mill/GX™).…”

Section: Biochip Fabricationmentioning

confidence: 99%

AC electric field induced dipole-based on-chip 3D cell rotation

et al. 2014

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The precise rotation of suspended cells is one of the many fundamental manipulations used in a wide range of biotechnological applications such as cell injection and enucleation in nuclear transfer (NT) cloning. Noticeably scarce among the existing rotation techniques is the three-dimensional (3D) rotation of cells on a single chip. Here we present an alternating current (ac) induced electric field-based biochip platform, which has an open-top sub-mm square chamber enclosed by four sidewall electrodes and two bottom electrodes, to achieve rotation about the two axes, thus 3D cell rotation. By applying an ac potential to the four sidewall electrodes, an in-plane (yaw) rotating electric field is generated and in-plane rotation is achieved. Similarly, by applying an ac potential to two opposite sidewall electrodes and the two bottom electrodes, an out-of-plane (pitch) rotating electric field is generated and rolling rotation is achieved. As a prompt proof-of-concept, bottom electrodes were constructed with transparent indium tin oxide (ITO) using the standard lift-off process and the sidewall electrodes were constructed using a low-cost micro-milling process and then assembled to form the chip. Through experiments, we demonstrate rotation of bovine oocytes of ~120 μm diameter about two axes, with the capability of controlling the rotation direction and the rate for each axis through control of the ac potential amplitude, frequency, and phase shift, and cell medium conductivity. The maximum observed rotation rate reached nearly 140° s⁻¹, while a consistent rotation rate reached up to 40° s⁻¹. Rotation rate spectra for zona pellucida-intact and zona pellucida-free oocytes were further compared and found to have no effective difference. This simple, transparent, cheap-to-manufacture, and open-top platform allows additional functional modules to be integrated to become a more powerful cell manipulation system.

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Section: Biochip Fabricationmentioning

confidence: 99%

AC electric field induced dipole-based on-chip 3D cell rotation

et al. 2014

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“…Therefore, depositing a thin film of another material on the YAG:Ce 3+ surface, offers a good alternative. SiO 2 , TiO 2 , and Si 3 N 4 are popular photonic bandgap materials used in the formation of PCLs on phosphor plates [181][182][183][184][185][186] and they can be deposited on a large scale with relatively low-cost processes. In particular, the high transparency at visible wavelengths and the relatively large refractive index (~2.4) of TiO 2 makes it a favorable material for making PCLs on YAG:Ce 3+ ceramic converters.…”

Section: White Ledsmentioning

confidence: 99%

Optoelectronic device physics and technology of nitride semiconductors from the UV to the terahertz

2017

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This paper reviews the device physics and technology of optoelectronic devices based on semiconductors of the GaN family, operating in the spectral regions from deep UV to Terahertz. Such devices include LEDs, lasers, detectors, electroabsorption modulators and devices based on intersubband transitions in AlGaN quantum wells (QWs). After a brief history of the development of the field, we describe how the unique crystal structure, chemical bonding, and resulting spontaneous and piezoelectric polarizations in heterostructures affect the design, fabrication and performance of devices based on these materials. The heteroepitaxial growth and the formation and role of extended defects are addressed. The role of the chemical bonding in the formation of metallic contacts to this class of materials is also addressed. A detailed discussion is then presented on potential origins of the high performance of blue LEDs and poorer performance of green LEDs (green gap), as well as of the efficiency reduction of both blue and green LEDs at high injection current (efficiency droop). The relatively poor performance of deep-UV LEDs based on AlGaN alloys and methods to address the materials issues responsible are similarly addressed. Other devices whose state-of-the-art performance and materials-related issues are reviewed include violet-blue lasers, 'visible blind' and 'solar blind' detectors based on photoconductive and photovoltaic designs, and electroabsorption modulators based on bulk GaN or GaN/AlGaN QWs. Finally, we describe the basic physics of intersubband transitions in AlGaN QWs, and their applications to near-infrared and terahertz devices.

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“…[16][17][18] To find solutions to these issues, white LEDs incorporating a transparent polycrystalline YAG:Ce ceramic plate phosphor (CPP) have recently been suggested by many research groups because CPPs, compared with conventional powder phosphors in applications for white pc-LED lighting, show certain advantages such as controlled light scattering, increased longevity, and improved heat dissipation. 11,13,[19][20][21] Quite recently, with the aim of replacing powder phosphors with CPPs in high-power white LEDs, we reported various two-dimensional (2D) photonic crystal layer (PCL)-assisted, Y 3 Al 5 O 12 :Ce 3+ (YAG:Ce) CPP-capped white LEDs exhibiting enhanced extraction efficiency and improved luminous efficacy. 22-26 4 In this study, we introduce and compare the optical properties of a flat Lu 3 Al 5 O 12 :Ce (LuAG:Ce) CPP and a 2D SiN X PCL-assisted LuAG:Ce CPP when those materials are incorporated into white pc-LEDs.…”

Section: Introductionmentioning

confidence: 99%

“…With the development of high-power and high-brightness solid-state lighting, interest in the use of TPCs in the field of white light-emitting diodes (LEDs) for general illumination has grown rapidly. − This is because the current leading commercial white LED (known as phosphor-converted LED, pc-LED), which consists of a combination of a blue LED chip and yellow phosphors (or green and red phosphors) packed with organic resin or silicone resin, undergoes degradation of luminous intensity, change of emission color, and deterioration of phosphor thermal quenching due to the poor thermal conductivity of the organic resin or the silicone resin. This problem becomes more and more serious with the increase of the LED chip temperature due to the increase of the output power necessary to realize high-power LEDs. − In addition, the conventional microsize powder phosphor in phosphor-in-cup typed LEDs attenuates the conversion efficiency and luminous efficacy from that of white pc-LED due to high scattering and reflecting loss of the emission from powder phosphors. − To find solutions to these issues, white LEDs incorporating a transparent polycrystalline YAG:Ce (YAG = yttrium aluminium garnet) ceramic-plate phosphor (CPP) have recently been suggested by many research groups because CPPs, compared with conventional powder phosphors in applications for white pc-LED lighting, show certain advantages such as controlled light scattering, increased longevity, and improved heat dissipation. ,,− Quite recently, with the aim of replacing powder phosphors with CPPs in high-power white LEDs, we reported various two-dimensional (2D) photonic crystal layer (PCL)-assisted, Y 3 Al 5 O 12 :Ce 3+ (YAG:Ce) CPP-capped white LEDs exhibiting enhanced extraction efficiency and improved luminous efficacy. − …”

Section: Introductionmentioning

confidence: 99%

Hybrid 2D Photonic Crystal-Assisted Lu₃Al₅O₁₂:Ce Ceramic-Plate Phosphor and Free-Standing Red Film Phosphor for White LEDs with High Color-Rendering Index

Park

Kang

et al. 2015

ACS Appl. Mater. Interfaces

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This paper reports the combined optical effects of a two-dimensional (2D) SiNx photonic crystal layer (PCL)-assisted Lu3Al5O12:Ce (LuAG:Ce) green ceramic-plate phosphor (CPP) and a free-standing (Sr,Ca)AlSiN3:Eu red film phosphor to enhance luminous efficacy, color rendering index (CRI), and special CRI (R9) of LuAG:Ce CPP-capped white light-emitting diodes (LEDs) for high-power white LEDs at 350 mA. By introducing the 2D SiNx PCL, the luminous efficacy was improved by a factor of 1.25 and 1.15 compared to that of the conventional flat CPP-capped LED and the thickness-increased CPP-capped LED (with a thickness of 0.15 mm), respectively, while maintaining low color-rendering properties. The combining of the free-standing red film phosphor in the flat CPP-capped, the 2D PCL-assisted CPP-capped, and the thickness-increased CPP-capped LEDs led to enhancement of the CRI and the special CRI (R9); it also led to a decrease of the correlated color temperature (CCT) due to broad wavelength coverage via the addition of red emission. High CRI (94), natural white CCT (4450 K), and acceptable luminous efficacy (71.1 lm/W) were attained from the 2D PCL-assisted LuAG:Ce CPP/free-standing red film phosphor-based LED using a red phosphor concentration of 7.5 wt %. It is expected that the combination of the 2D PCL and the free-standing red film phosphor will be a good candidate for achieving a high-power white CPP-capped LED with excellent CRI.

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Nanopatterning using a simple bi-layer lift-off process for the fabrication of a photonic crystal nanostructure

Cited by 11 publications

References 15 publications

AC electric field induced dipole-based on-chip 3D cell rotation

AC electric field induced dipole-based on-chip 3D cell rotation

Optoelectronic device physics and technology of nitride semiconductors from the UV to the terahertz

Hybrid 2D Photonic Crystal-Assisted Lu₃Al₅O₁₂:Ce Ceramic-Plate Phosphor and Free-Standing Red Film Phosphor for White LEDs with High Color-Rendering Index

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Nanopatterning using a simple bi-layer lift-off process for the fabrication of a photonic crystal nanostructure

Cited by 11 publications

References 15 publications

AC electric field induced dipole-based on-chip 3D cell rotation

AC electric field induced dipole-based on-chip 3D cell rotation

Optoelectronic device physics and technology of nitride semiconductors from the UV to the terahertz

Hybrid 2D Photonic Crystal-Assisted Lu3Al5O12:Ce Ceramic-Plate Phosphor and Free-Standing Red Film Phosphor for White LEDs with High Color-Rendering Index

Contact Info

Product

Resources

About

Hybrid 2D Photonic Crystal-Assisted Lu₃Al₅O₁₂:Ce Ceramic-Plate Phosphor and Free-Standing Red Film Phosphor for White LEDs with High Color-Rendering Index