Nanopatterning of oxide 2-dimensional electron systems using low-temperature ion milling

D’Antuono, Maria; Kalaboukhov, Alexei; Caruso, Roberta; Wissberg, Shai; Sobelman, S Weitz; Kalisky, Beena; Ausanio, G.; Salluzzo, M.; Stornaiuolo, Daniela

doi:10.1088/1361-6528/ac385e

Cited by 4 publications

(4 citation statements)

References 46 publications

(51 reference statements)

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“…[ 27 ] Another approach consists in reducing the kinetics of the oxygen vacancy formation and diffusion out of the sample by cooling it with liquid nitrogen during the ion beam etching. [ 28 ] The sides of the devices thus fabricated are free, and could couple in‐plane to subsequently grown complex materials such as conventional superconductors. Using this technique, a pattern resolution of 160 nm could be reached.…”

Section: Resultsmentioning

confidence: 99%

“…Using this technique, a pattern resolution of 160 nm could be reached. [28] Here, a thin film of Al was sputtered on a (111)-oriented KTaO 3 , then oxidized to AlO x in air, and subsequently capped by a 10 nm thick protective layer of amorphous LaAlO 3 grown by pulsed laser deposition in O 2 atmosphere at 1 × 10 −6 mbar. We then patterned the sample by UV lithography to form 25 μm wide Hall bars.…”

Section: Resultsmentioning

confidence: 99%

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Patterning of Superconducting Two‐Dimensional Electron Gases based on AlO_x/KTaO₃ (111) Interfaces

Witt

Mallik

Vicente-Arche

et al. 2023

Advanced Physics Research

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The versatility of properties displayed by two‐dimensional electron gases (2DEGs) at oxide interfaces has fostered intense research in hope of achieving exotic electromagnetic effects in confined systems. Of particular interest is the recently discovered superconducting state appearing in (111)‐oriented KTaO3 interfaces, with a critical temperature Tc≈2 K, almost 10 times higher than that of SrTiO3‐based 2DEGs. Just as in SrTiO3‐based 2DEGs, fabricating devices in this new system is a technical challenge due to the fragility of the 2DEG and the propensity of bulk KTaO3 to become conducting outside the devices upon adventitious oxygen vacancy doping. Here, three different techniques are presented for patterning Hall bars in AlOx/KTaO3 (111) heterostructures. The devices show superconducting transitions ranging from 1.3 to 1.78 K, with limited degradation from the unpatterned thin film, and enable an efficient tuning of the carrier density by electric field effect. The array of techniques allows for the definition of channels with a large range of dimensions for the design of various kinds of devices to explore the properties of this system down to the nanoscale.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlO_x/KTaO₃ (111) Interfaces

Witt

Mallik

Vicente-Arche

et al. 2023

Advanced Physics Research

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“… 11 , revealing high structural and chemical order. Some of the samples investigated were patterned to realize a Hall bars 500 μm wide, using photolithography and low-temperature ion milling 27 .…”

Section: Methodsmentioning

confidence: 99%

Tuning of the magnetotransport properties of a spin-polarized 2D electron system using visible light

D’Antuono

Chen

Caruso

et al. 2023

Sci Rep

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We report on the effects of visible light on the low temperature electronic properties of the spin-polarized two dimensional electron system (2DES) formed at the interfaces between LaAlO$$_{3}$$ 3 , EuTiO$$_{3}$$ 3 and (001) SrTiO$$_{3}$$ 3 . A strong, persistent modulation of both longitudinal and transverse conductivity was obtained using light emitting diodes (LEDs) with emissions at different wavelengths in the visible spectrum range. In particular, Hall effect data show that visible light induces a non-volatile electron filling of bands with mainly 3d$$_{xz,yz}$$ x z , y z character, and at the same time an enhancement of the anomalous Hall effect associated to the magnetic properties of the system. Accordingly, a suppression of the weak-anti localization corrections to the magneto-conductance is found, which correlates with an enhancement of the spin-polarization and of the ferromagnetic character of 2DES. The results establish the LED-induced photo-doping as a viable route for the control of the ground state properties of artificial spin-polarized oxide 2DES.

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“…In addition, specific works on the basic SPM mechanisms are the contrast due to Van der Waals interactions [135] and metrological measurements [136,137]. Differently from the recent past [138], nanofabrication with SPM has been replaced by ion milling [139,140], whereas nanomanipulation has been abandoned, except for a recent example [141].…”

Section: Scientific Research Publications and Fundings Of Italian Spm...mentioning

confidence: 99%

Probing Italy: A Scanning Probe Microscopy Storyline

Dinelli

Brucale

Valle

et al. 2023

Micro

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Starting from the late 1980’s, scanning probe microscopy has progressively diffused in Italy until today. In this paper, we provide a brief account of the main historical events and a current picture of the distribution of the active groups. A survey was prepared by LimeSurvey, made of six sections asking for personal and institutional data, human resources, equipment available, fields of interest, research projects, educational/dissemination activities, and two relevant publications in the last six years. It turns out that the Italian community includes more than seventy groups and two companies. It is widely diffused, although mostly concentrated near large academic and research institutions, often in locations where prominent Italian researchers have operated. This community is active in many scientific fields and can produce research of high international quality. It shows a wide competence, as proven by the list of research works published in journals ranked within the top 20% class. The diffusion of SPM microscopes in industry is still sporadic, possibly due to extensive collaborations between the research institutions and industries themselves. The authors hope that this work might be useful to the community and beyond, and that it might stimulate the formation of a more structured network.

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Nanopatterning of oxide 2-dimensional electron systems using low-temperature ion milling

Cited by 4 publications

References 46 publications

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlO_x/KTaO₃ (111) Interfaces

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlO_x/KTaO₃ (111) Interfaces

Tuning of the magnetotransport properties of a spin-polarized 2D electron system using visible light

Probing Italy: A Scanning Probe Microscopy Storyline

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Nanopatterning of oxide 2-dimensional electron systems using low-temperature ion milling

Cited by 4 publications

References 46 publications

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces

Tuning of the magnetotransport properties of a spin-polarized 2D electron system using visible light

Probing Italy: A Scanning Probe Microscopy Storyline

Contact Info

Product

Resources

About

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlO_x/KTaO₃ (111) Interfaces

Patterning of Superconducting Two‐Dimensional Electron Gases based on AlO_x/KTaO₃ (111) Interfaces