Nanoparticle size and shape evaluation using the TSOM method

Damazo, Bradley N.; Attota, Ravikiran; Kavuri, Purushotham; Vladár, András

doi:10.1117/12.918263

Cited by 5 publications

(3 citation statements)

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“…1,2 Therefore, TSOM challenges the view that only the in-focus image is meaningful in the traditional optical measurements, avoids the limit of Rayleigh diffraction of the optical system, and thus achieves nanometre-level measurement, which is very suitable for the measurement requirements of mass production. Nowadays, TSOM is widely applied in mask-defect detection, 3 nanometre-level dimensional measurements of three-dimensional structures, 4 nanoparticle shape evaluation 5 and optical microscope illumination analysis. 6 At present, the library-matching method 1,2,5 is often used to match the TSOM image of sample of unknown size with the image in a simulated TSOM image library.…”

Section: Introductionmentioning

confidence: 99%

“…Nowadays, TSOM is widely applied in mask-defect detection, 3 nanometre-level dimensional measurements of three-dimensional structures, 4 nanoparticle shape evaluation 5 and optical microscope illumination analysis. 6 At present, the library-matching method 1,2,5 is often used to match the TSOM image of sample of unknown size with the image in a simulated TSOM image library. Two parameters of the normalised TSOM image, the optical intensity range (OIR) and the mean-square intensity (MSI), are used in this method to establish its regression model about the size of nanostructures, thus achieving nanometre-level measurement.…”

Section: Introductionmentioning

confidence: 99%

“…At present, the library‐matching method 1,2,5 is often used to match the TSOM image of sample of unknown size with the image in a simulated TSOM image library. Two parameters of the normalised TSOM image, the optical intensity range (OIR) and the mean‐square intensity (MSI), are used in this method to establish its regression model about the size of nanostructures, thus achieving nanometre‐level measurement.…”

Section: Introductionmentioning

confidence: 99%

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A through‐focus scanning optical microscopy dimensional measurement method based on deep‐learning classification model

Nie

Peng

Jia-jun

2021

Journal of Microscopy

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Through-focus scanning optical microscopy (TSOM) is an economical, noncontact and nondestructive method for rapid measurement of three-dimensional nanostructures. There are two methods using TSOM image to measure the dimensions of one sample, including the library-matching method and the machine-learning regression method. The first has the defects of small measurement range and strict environmental requirements; the other has the disadvantages of feature extraction method greatly influenced by human subjectivity and low measurement accuracy. To solve the problems above, a TSOM dimensional measurement method based on deep-learning classification model is proposed.TSOM images are used to train the ResNet50 and DenseNet121 classification model respectively in this paper, and the test images are used to test the model, the classification result of which is taken as the measurement value. The test results showed that with the number of training linewidths increasing, the mean square error (MSE) of the test images is 21.05 nmš for DenseNet121 model and 31.84 nmš for ResNet50 model, both far lower than machine-learning regression method, and the measurement accuracy is significantly improved. The feasibility of using deep-learning classification model, instead of machine-learning regression model, for dimensional measurement is verified, providing a theoretical basis for further improvement on the accuracy of dimensional measurement.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A through‐focus scanning optical microscopy dimensional measurement method based on deep‐learning classification model

Nie

Peng

Jia-jun

2021

Journal of Microscopy

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Nanoparticle size determination using optical microscopes

Attota¹,

Kavuri²,

Kang³

et al. 2014

Applied Physics Letters

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We present a simple method for size determination of nanoparticles using conventional optical microscopes. The method, called through-focus scanning optical microscopy, makes use of the four-dimensional optical information collected at different focus positions. Low partial coherence illumination combined with analysis of through-focus optical content enables nanoparticle size determination with nanometer scale sensitivity. We experimentally demonstrate this using fabricated Si nanodots and spherical gold nanoparticles. The method is economical, as no hardware modifications to conventional optical microscopes are needed. In addition, the method also has high throughput and potential for soft nanoparticle size determination without distortion.

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Machine-learning models for analyzing TSOM images of nanostructures

Hao

2019

Opt. Express

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Nanoparticle size and shape evaluation using the TSOM method

Cited by 5 publications

References 0 publications

A through‐focus scanning optical microscopy dimensional measurement method based on deep‐learning classification model

A through‐focus scanning optical microscopy dimensional measurement method based on deep‐learning classification model

Nanoparticle size determination using optical microscopes

Machine-learning models for analyzing TSOM images of nanostructures

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