Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

Pustan, Marius; Dudescu, Cristian; Bîrleanu, Corina; Rymuza, Z.

doi:10.3139/146.110879

Cited by 8 publications

(11 citation statements)

References 11 publications

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“…Those three main batch code files, once individually loaded in ANSYS, build the 3D solid model of the sensor, optimize its FE meshing, and perform different simulations to completely characterize the device behavior. For instance, one of the files configures the program solver to calculate the sensor deflection and equivalent capacitance for a uniformly applied pressure in the intended operation range of

Similarly, a second main file sets the solver to evaluate the sensor deflection and capacitance under the presence of a central force load (

), similar to the one that can be applied by an AFM microscope operating in contact mode [ 6 , 7 , 8 , 9 ]; and described in detail in Section 2.1 . Finally, the last main code file arranges a modal analysis to determine the natural frequencies of the structure.…”

Section: Methodsmentioning

confidence: 99%

“…Considering an AFM piezo vertical displacement

during the measurement required to move the sample position, it is noticeable that

combines both the AFM probe and MEMS sensor displacements, as shown in Figure 1 . Thus, the resulting sensor displacement

can be calculated as follows [ 6 , 7 , 8 , 9 ]:

…”

Section: Introductionmentioning

confidence: 99%

“…To summarize, and as stated in Pustan et al [ 9 ], AFMs can be utilized to evaluate the mechanical properties of micro/nanoscale structures and nanomaterials used in MEMS and NanoElectroMechanical Systems (NEMS). More specifically, this work concludes that the dependency between an acting force and the sample deflection is determined by the AFM static mode, and from that data, the stiffness of the microcantilever can be computed.…”

Section: Introductionmentioning

confidence: 99%

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AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

2018

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Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry. This system on chip fabrication allows the devices to meet the crucial requirements of accuracy, reliability, low-power, and reduced size that any life-sustaining medical application imposes. In this regard, the characterization of stand-alone prototype sensors in an efficient but affordable way to verify sensor performance and to better recognize further areas of improvement is highly advisable. This work proposes a novel characterization method based on an atomic force microscope (AFM) in contact mode that permits to calculate the maximum deflection of the flexible top plate of a capacitive MEMS pressure sensor without coating, under a concentrated load applied to its center. The experimental measurements obtained with this method have allowed to verify the bending behavior of the sensor as predicted by simulation of analytical and finite element (FE) models. This validation process has been carried out on two sensor prototypes with circular and square geometries that were designed using a computer-aided design tool specially-developed for capacitive MEMS pressure sensors.

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Similarly, a second main file sets the solver to evaluate the sensor deflection and capacitance under the presence of a central force load (

Section: Methodsmentioning

confidence: 99%

“…Considering an AFM piezo vertical displacement

during the measurement required to move the sample position, it is noticeable that

combines both the AFM probe and MEMS sensor displacements, as shown in Figure 1 . Thus, the resulting sensor displacement

can be calculated as follows [ 6 , 7 , 8 , 9 ]:

…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

2018

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“…In [10,12,96,102,103,116,117], the procedure for obtaining the friction data consisted of measuring the cantilever lateral deflection while scanning the AFM probe back and-forth normal to the groove in contact with the sample at a setpoint of 10nN. After scanning the thin film with an AFM tip, the trace and retrace profiles were collected for each row of the topographic image and the chosen normal load was applied.…”

Section: Friction Coefficient (Cof)mentioning

confidence: 99%

AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

et al. 2021

Self Cite

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Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devices. A great deal of research has been conducted to evaluate the efficiency and reliability of different measurements methods for mechanical properties of MEMS material; nevertheless, the technologies regarding manufacturing and testing MEMS materials are not fully developed. The objectivesof this study are to focus on the review of the mechanical and tribological advantages of thin film and to highlight the experimental results of some thin films to obtain quantitative analyses, the elastic/plastic response and the nanotribological behavior. The slight fluctuation of the results for common thin-film materials is most likely due to the lack of international standardization for MEMS materials and for the methods used to measure their properties.

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“…Microelectromechanical components such as microcantilevers, microbridges or micromembranes are usually used in microtransduction for actuation and sensing. One layer achieves the structural and elastic recovery function and the other layer acts as the active part by deforming under actuations (Pustan et al, 2013). Determination of the failure mechanisms of micro/nanocomponents is the key to the design of reliable products.…”

Section: Introductionmentioning

confidence: 99%

Synthesis, structural and nanomechanical properties of cobalt based thin films

Koumoulos

Tsikourkitoudi

Kartsonakis

et al. 2015

International Journal of Structural Integrity

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Purpose – The purpose of this paper is to produce cobalt (Co)-based thin films by metalorganic chemical vapor deposition (CVD) technique and then to evaluate structural and mechanical integrity. Design/methodology/approach – Co-based thin films were produced by metalorganic CVD technique. Boronizing, carburization and nitridation of the produced Co thin films were accomplished through a post-treatment stage of thermal diffusion into as-deposited Co thin films, in order to produce cobalt boride (Co2B), cobalt carbide and cobalt nitride thin films in the surface layer of Co. The surface topography and the crystal structure of the produced thin films were evaluated through scanning electron microscopy and X-ray diffraction, respectively. The mechanical integrity of the produced thin films was evaluated through nanoindentation technique. Findings – The obtained results indicate that Co2B thin film exhibits the highest nanomechanical properties (i.e. H and E), while Co thin film has enhanced plasticity. The cobalt oxide thin film exhibits higher resistance to wear in comparison to the cobalt thin film, a fact that is confirmed by the nanoscratch analysis showing lower coefficient of friction for the oxide. Originality/value – This work is original.

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Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

Cited by 8 publications

References 11 publications

AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

Synthesis, structural and nanomechanical properties of cobalt based thin films

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