Nanolithography Using High Transmission Nanoscale Bowtie Apertures

Wang, Liang; Uppuluri, Sreemanth M.; Jin, Eric X.; Xu, Xianfan

doi:10.1021/nl052371p

Cited by 233 publications

(157 citation statements)

References 18 publications

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“…The strong field enhancement of dipole antennas has readily been shown by white light continuum generation [12]. Bowtie antennas have recently been used as near-field probes and for nanolithography [35,36]. The potential of both structures for the enhancement of the fluorescence of molecules has also been demonstrated [37][38][39].…”

Section: Introductionmentioning

confidence: 99%

Engineering the optical response of plasmonic nanoantennas

2008

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Abstract:The optical properties of plasmonic dipole and bowtie nanoantennas are investigated in detail using the Green's tensor technique. The influence of the geometrical parameters (antenna length, gap dimension and bow angle) on the antenna field enhancement and spectral response is discussed. Dipole and bowtie antennas confine the field in a volume well below the diffraction limit, defined by the gap dimensions. The dipole antenna produces a stronger field enhancement than the bowtie antenna for all investigated antenna geometries. This enhancement can reach three orders of magnitude for the smallest examined gap. Whereas the dipole antenna is monomode in the considered spectral range, the bowtie antenna exhibits multiple resonances. Furthermore, the sensitivity of the antennas to index changes of the environment and of the substrate is investigated in detail for biosensing applications; the bowtie antennas show slightly higher sensitivity than the dipole antenna.

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Section: Introductionmentioning

confidence: 99%

Engineering the optical response of plasmonic nanoantennas

2008

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“…When integrated with flexible dielectric substrates, GNR can also overcome the proneness of micro-cracks in metallic thin films for conformal antennas. For example, a conformal microstrip patch consisting of two parallel electric conductors separated by a dielectric material was proposed in [17], fabricated by thin film deposition and nanolithography techniques [18]. Besides solving the mismatch problems in the THz regime [4], this basic topology is also widely used due to its miniaturization ability and conformality [10].…”

Section: Introductionmentioning

confidence: 99%

The Performance Improvement of THZ Antenna via Modeling and Characterization of Doped Graphene

Gatte¹,

Soh²,

Rahim³

et al. 2016

PIER M

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Abstract-The improvement of Terahertz (THz) antenna requires efficient (nano)materials to operate within the millimeter wave and THz spectrum. In this paper, doped graphene is used to improve the performance of two types of patch antennas, a rectangular and an elliptical antenna. The surface conductivity of conventional (non-doped) graphene is first modeled prior to the design and simulation of the two graphene based antennas in an electromagnetic solver. Next, different graphene models and their corresponding surface conductivities are computed based on different bias voltages or chemical doping. These configurations are then benchmarked against a similar antenna based on conventional metallic (copper) conductor to quantify their levels of performance improvement. The graphene based antennas showed significant improvements for most parameters of antenna than that of the conventional antenna. Besides that, the higher chemical potentials resulting from higher biasing voltages also resulted in this trend. Finally, the elliptical patch graphene antenna indicated better reflection performance, radiation efficiency and gain than a rectangular patch operating at the same resonant frequency.

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“…Among various types of nanofabrication methods, such as electron beam lithography, nanoimprint lithography [2], dip-pen lithography [3] and laser direct writing [4], near-field optical lithography using metallic nano-apertures or antennas is a promising technique due to its capacity of sub-diffraction resolution, cost effective, and possibility of parallel operation. In this type of lithography, sharp-ridged apertures in metal, such as bowtie, C-and H-shaped apertures and plasmonic lenses are important structures as the optical focusing element due to its capability of producing high confined light spots beyond the diffraction limit with enhanced intensity in the near-field region [5][6][7][8][9][10]. However, the transmitted light of the aperture is subjected to strong divergence.…”

Section: Introductionmentioning

confidence: 99%

Optical nanolithography with λ/15 resolution using bowtie aperture array

et al. 2014

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We report optical parallel nanolithography using bowtie apertures with the help of the interferometricspatial-phase-imaging (ISPI) technique. The ISPI system can detect and control the distance between the bowtie aperture, and photoresist with a resolution of sub-nanometer level. It overcomes the difficulties brought by the light divergence of bowtie apertures. Parallel nanolithography with feature size of 22 ± 5 nm is achieved. This technique combines high resolution, parallel throughput, and low cost, which is promising for practical applications.

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Nanolithography Using High Transmission Nanoscale Bowtie Apertures

Cited by 233 publications

References 18 publications

Engineering the optical response of plasmonic nanoantennas

Engineering the optical response of plasmonic nanoantennas

The Performance Improvement of THZ Antenna via Modeling and Characterization of Doped Graphene

Optical nanolithography with λ/15 resolution using bowtie aperture array

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