Nanolithography Toolbox

Ilic, Robert R.; Balram, Krishna C.; Westly, Daron; Davanço, Marcelo; Grutter, Karen E.; Li, Qing; Michels, Thomas; Ray, Christopher H.; Yu, Liya E.; Bertrand, Neal A.; Stavis, Samuel M.; Aksyuk, Vladimir A.; Liddle, James Alexander A.; Bryce, Brian A.; Lobontiu, Nicolae; Liu, Yuxiang; Metzler, Meredith; Lopez, Gerald G; Czaplewski, David A.; Ocola, Leonidas E.; Neužil, Pavel; Svatoš, Vojtěch; Krylov, Slava; Wallin, Christopher B.; Gilbert, Ian; Dill, Kristen A.; Kasica, Richard; Srinivasan, Kartik; Simelgor, Gregory; Topolancik, Juraj

doi:10.6028/nist.hb.160

Cited by 3 publications

(2 citation statements)

References 26 publications

(29 reference statements)

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“…Using this process we have fabricated a wide variety of transducers based on an optomechanical readout. The device presented in this work with the were designed "Nanolithography Toolbox", a free software package developed by the Center for Nanoscale Science and Technology [42,43] …”

Section: Resultsmentioning

confidence: 99%

Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation

Michels¹,

Rangelow²,

Aksyuk³

2016

J. RES. NATL. INST. STAN.

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This article reports a process for batch fabrication of a fiber pigtailed optomechanical transducer platform with overhanging. The platform enables a new class of high bandwidth, high sensitivity, and highly integrated sensors that are, compact, robust, and small, with the potential potential for low cost batch fabrication inherent in Micro-Opto-Electro-Mechanical-Systems technology. This article provides a guide to the whole fabrication process and explains critical steps and process choices in detail. Possible alternative fabrication techniques and problems are discussed. The fabrication process consists of electron beam lithography, i-line stepper lithography, and back-and frontside mask aligner lithography. The goal of this article is to provide a comprehensive description of the fabrication process, presenting context and details which are highly relevant to the rational implementation and reliable repetition of the process. Moreover, this process makes use of equipment commonly found in nanofabrication facilities and research laboratories, facilitating the broad adaptation and application of the process. Therefore, while this article specifically informs users of the Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), we anticipate that this information will be generally useful for the nano-and microfabrication research communities at large.

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Section: Resultsmentioning

confidence: 99%

Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation

Michels¹,

Rangelow²,

Aksyuk³

2016

J. RES. NATL. INST. STAN.

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“…In the latter case, the resulting rendered shapes have an increased vertex density at higher curvatures. A full description of the all the capabilities of the Toolbox can be found in the manual [25].…”

Section: Discussionmentioning

confidence: 99%

The Nanolithography Toolbox

Balram

Westly

Davanço

et al. 2016

J. RES. NATL. INST. STAN.

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This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

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Optical Probe for Nondestructive Wafer-Scale Characterization of Photonic Elements

Michels

Aksyuk

2017

IEEE Photon. Technol. Lett.

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Nanolithography Toolbox

Cited by 3 publications

References 26 publications

Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation

Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation

The Nanolithography Toolbox

Optical Probe for Nondestructive Wafer-Scale Characterization of Photonic Elements

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