2009
DOI: 10.1002/adma.200702484
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Nanoimprint Lithography on Silica Sol–Gels: A Simple Route to Sequential Patterning

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Cited by 78 publications
(66 citation statements)
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References 16 publications
(24 reference statements)
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“…Alternatively, photolithography-free patterning methods, such as nanoimprint (35), and LangmuirBlodgett assembly and etching (36), may be used to fabricate silica photonic crystals and microstructures in general at lower cost and larger scales. Moreover, although we have realized a visibly transparent thermal blackbody with the use of a silica photonic crystal, there are likely other approaches to achieving the same functionality, including multilayer dielectric coatings, that are even more cost-effective for large-scale fabrication.…”
Section: Discussionmentioning
confidence: 99%
“…Alternatively, photolithography-free patterning methods, such as nanoimprint (35), and LangmuirBlodgett assembly and etching (36), may be used to fabricate silica photonic crystals and microstructures in general at lower cost and larger scales. Moreover, although we have realized a visibly transparent thermal blackbody with the use of a silica photonic crystal, there are likely other approaches to achieving the same functionality, including multilayer dielectric coatings, that are even more cost-effective for large-scale fabrication.…”
Section: Discussionmentioning
confidence: 99%
“…Nanoimprint lithography ͑NIL͒ potentially fulfills these requirements. [4][5][6][7][8][9] When pressing a textured mold onto a soft film ͑resist͒ deposited on the surface, the film material flows into the mask features. If the system is crosslinked or quenched before the mold is released, permanent surface features are obtained.…”
mentioning
confidence: 99%
“…The dimensions necessary for daylighting applications also pose a challenge, requiring a period of 400 nm, an aspect ratio of 2 · h∕Λ 1.75, and transparency of the material. To fulfill these demands, the simple and low-cost SSGNIL [25,26] process is used to imprint nanometric patterns in a thin film on glass. In particular, the chosen sol-gel material has two principal advantages: its optical properties are similar to glass (refractive index 1.45) and it has a strong adhesion to glass substrates.…”
Section: Nanoimprint Fabricationmentioning
confidence: 99%