Nanoforest of 3C–SiC/graphene by laser chemical vapor deposition with high electrochemical performance

Sun, Qiming; Tu, Rong; Xu, Qifeng; Zhang, Chitengfei; Li, Jun; Ohmori, Hitoshi; Kosinova, Marina; Basu, Bikramjit; Yan, Jiasheng; Li, Shusen; Goto, Takashi; Zhang, Lianmeng; Zhang, Song

doi:10.1016/j.jpowsour.2019.227308

Cited by 16 publications

(9 citation statements)

References 40 publications

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“…Recently, Zhang's group successfully realized the growth of graphene/SiC heterostructure by LCVD with monocrystalline Si as substrate, and the schematic of reaction apparatus is shown in Figure a. [ 62 ] To deposit 3C‐SiC/graphene nanocomposite, the evaporative hexamethyldisilane (HMDS) as only source was carried into the deposition chamber with H 2 dilution gas and Ar carrier gas, then the graphene and 3C‐SiC films can achieve one‐step growth on monocrystalline Si substrate with the 1064 nm laser continuously illumination for 20 min. During LCVD process, partial Si atom of the pregenerated SiC will be etched by the synergetic effects of laser and H 2 , leaving C–C band bonded C atoms formed graphene epitaxially on the SiC.…”

Section: Laser‐assisted Synthesis Of Graphenementioning

confidence: 99%

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Laser‐Based Growth and Treatment of Graphene for Advanced Photo‐ and Electro‐Related Device Applications

Wang

Yang

et al. 2022

Adv Funct Materials

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Graphene is considered as a competitive material for the development of photo-and electrodevices because of its superior electrical and optical properties. Meanwhile, laser processing technologies with high precision, fast reaction speed, and high maneuverability are widely used for the fast and facile fabrication of functionalized graphene and relevant devices. In particular, it enables desired performance tuning, programmable structural designing, micro-or nanoscale processing, and large-scale integration for advanced graphene-based photo-and electro-related devices, which has greatly promoted the development of multiscale and multidimensional device manufacturing technology. In this review, the interaction principle and processing strategies of functional graphene prepared and treated by laser, especially for the regulation of optical and electrical properties, will be fully understood and introduced. The latest progress and reports of advanced photoelectro devices, including electric energy storage devices, generators, sensors, actuators, photo detectors, photothermal devices, and photovoltaic devices, are classified and summarized. In general, this review may provide positive and meaningful guidance for flourishing graphene-based photo-and electroindustries.

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Section: Laser‐assisted Synthesis Of Graphenementioning

confidence: 99%

Section: Laser‐assisted Synthesis Of Graphenementioning

confidence: 99%

Laser‐Based Growth and Treatment of Graphene for Advanced Photo‐ and Electro‐Related Device Applications

Wang

Yang

et al. 2022

Adv Funct Materials

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“…[146] Herein, microcrystalline, nanocrystalline, and epitaxial SiC films were systematically compared, in which the nanocrystalline structure presented highest double-layer capacitance and lowest redox reversibility because of the large diversity in crystal size, high amount of grain boundaries and amorphous phases; while the epitaxial structure displayed a sharp contrast due to its high purity and (001) orientation. Second, as tactics to enhance electronic conductivity, numerous unique carbon-based SiC electrodes have been reported, such as C-Ni-SiC composite, [147] graphene-wrapped SiC nanoparticles, [148] nanoforest-like SiC/ graphene film, [149] graphitic carbon-coated SiC nanowires, [150] and thin film SiC-derived graphene. [184] Noticeably, SiC/Si double layer was revealed to be a promising charge storage platform, in which the SiC thin film on Si wafer served as both a source and template to grow a high-surface-area porous graphene film via Ni-assisted process at high temperature.…”

Section: Overview Of Materials Design In Sic Electrodesmentioning

confidence: 99%

Advances in Si and SiC Materials for High‐Performance Supercapacitors toward Integrated Energy Storage Systems

Nguyen

Aberoumand

Dao

2021

Small

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recently attracted considerable research attention thanks to its low mass density (2.33 g cm −3 ), nontoxicity, and biocompatibility. [6,7] Besides, the intrinsic semiconductor and tunable on-chip characteristics enable Si to be a central platform of several applications, including optoelectronics, [8,9] microelectronics, [10] smart sensors, [11,12] solar cells, [13][14][15] and drug-delivery systems. [16] From an energy perspective, seamless integration of energy storage systems onto these Si-based functional devices is highly desirable toward portable and wearable applications, or when the power supply is intermittent. Therefore, significant research has focused on Sibased energy storage, including Si-based batteries (mainly Li-ion batteries) and Sibased supercapacitors.In Li-ion batteries, Si has been intensively studied as a promising anode candidate due to the low working potential of 0.4 V (vs Li + /Li) and high theoretical capacity (3579 mAh g −1 ), compared to the conventional graphite anode. [17] However, as an alloy-type material, Si anode notoriously suffers from huge volume expansion/shrinkage during lithiation/delithiation (over 300%), leading to severe delamination and pulverization of electrodes, together with unstable and nonuniform solid electrolyte interphase layers. [18] These characteristics considerably affect the cyclic stability of Si-anode Li-ion batteries. Several strategies have been implemented to address the aforementioned challenges, including composite and coating materials design, [19][20][21][22][23][24] binder design, [25][26][27][28] and electrolyte modification. [29][30][31][32] These approaches nevertheless are mainly based on wet-chemistry methods with complicated synthesis techniques, which are not suitable for an integrated system. A very thin layer of Si has been proven to accommodate the mechanical stress during alloying/ dealloying. [33][34][35] Inspired by this concept, several studies have focused on thin film Si-anode batteries based on integrated circuit (IC)-compatible routes, and their potentials to be integrated with other functional Si-based devices. [36][37][38][39] However, the intricate charge storage mechanism of Si-based batteries inevitably limits their applications. In particular, batteries suffer from low power performance. Although parallel and/or series connections of batteries can guarantee high power, the device volume will be increased, which is not desirable for an integrated system. Furthermore, owing to their inferior stability and lifetime, batteries unavoidably require frequent replacements, meaning that they cannot be applied in devices such as bioimplant chips, biosensors, and harsh-environment sensors. [40,41] Silicon (Si), as the second most abundant element on Earth, has been a central platform of modern electronics owing to its low mass density and unique semiconductor properties. From an energy perspective, all-in-one integration of power supply systems onto Si-based functional devices is highly desirable, which inspires significant study ...

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“…Graphene has been found nontoxic to neuronal cells, which makes it widely used in the biomedical field . Our previous study reported that the 3C-SiC/graphene film electrode prepared by laser chemical vapor deposition (LCVD) possesses high conductivity and large capacitance as a supercapacitor electrode compared with the pure 3C-SiC film . Therefore, the SiC/graphene composite film prepared by CVD may provide great opportunities in manufacturing implantable DA sensors with outstanding detection ability and biocompatibility.…”

Section: Introductionmentioning

confidence: 99%

“…16−18 Cubic SiC (3C-SiC) displays excellent biological compatibility, 19 good electrochemical performance, 20 and high adaptability with the Si-based semiconductor industry. 21 These characteristics make 3C-SiC a competitive material for implantable and miniaturized biomedical applications. Currently, Zhuang et al have reported an electrochemical DA sensor comprising a 3C-SiC film on a single-crystalline Si wafer.…”

Section: Introductionmentioning

confidence: 99%

SiC/Graphene Film by Laser CVD as an Implantable Sensor Material for Dopamine Detection

Cai

et al. 2023

ACS Appl. Mater. Interfaces

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Implantable electrochemical sensor holds great promise in the real-time monitoring of dopamine (DA) to regulate body function. However, the real application of these sensors is limited by the weak current signal of DA in the human body and the poor compatibility of the on-chip microelectronic devices. In this work, a SiC/graphene composite film was fabricated using laser chemical vapor deposition (LCVD) and employed as a DA sensor. The graphene in the porous nanoforest-like SiC framework offered efficient channels for electronic transmission, leading to an enhanced electron transfer rate and consequently an increased current response for DA detection. The three-dimensional (3D) porous network also facilitated the exposure of more catalytic active sites toward DA oxidation. Besides, the wide distribution of graphene in the nanoforest-like SiC films reduced the interfacial resistance of the charge transfer. The SiC/graphene composite film exhibited excellent electrocatalytic activity toward DA oxidation with a low detection limit of 0.11 μM and a high sensitivity of 0.86 μA·μM–1·cm–2. The film electrode also showed a wide linear response for DA in 0.5–78 μM, along with good selectivity, repeatability, and reproducibility. Furthermore, the cell counting kit-8 (CCK-8) and live–dead assays revealed that the film is also biocompatible for biomedical applications. Therefore, the nanoforest-like SiC/graphene composite film via the CVD process enables a promising candidate for an integrated miniature DA biosensor with high detection performance.

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Nanoforest of 3C–SiC/graphene by laser chemical vapor deposition with high electrochemical performance

Cited by 16 publications

References 40 publications

Laser‐Based Growth and Treatment of Graphene for Advanced Photo‐ and Electro‐Related Device Applications

Laser‐Based Growth and Treatment of Graphene for Advanced Photo‐ and Electro‐Related Device Applications

Advances in Si and SiC Materials for High‐Performance Supercapacitors toward Integrated Energy Storage Systems

SiC/Graphene Film by Laser CVD as an Implantable Sensor Material for Dopamine Detection

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