2021
DOI: 10.1166/jnn.2021.19327
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Nanofabrication Techniques: Challenges and Future Prospects

Abstract: Nanofabrication of functional micro/nano-features is becoming increasingly relevant in various electronic, photonic, energy, and biological devices globally. The development of these devices with special characteristics originates from the integration of low-cost and high-quality micro/nano-features into 3D-designs. Great progress has been achieved in recent years for the fabrication of micro/nanostructured based devices by using different imprinting techniques. The key problems are designing techniques/appro… Show more

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Cited by 13 publications
(6 citation statements)
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“…The second characteristic is made possible by the invention of high-resolution transmission electron microscopy (HR-TEM), scanning probe microscopy (SPM), scanning tunneling microscopy (STM) and atomic force microscopy (AFM) techniques [13]. The third characteristic is a result of the developments of various nanofabrication techniques such as nanoimprint lithography (NIL) using electron beams or X-rays and due to a physical phenomenon known as ''quantum confinement'' effect [14]. The developments in nanotechnology research have progressively increased, mainly due to new and desirable properties of nanomaterials.…”
Section: The Nano Revolutionmentioning
confidence: 99%
“…The second characteristic is made possible by the invention of high-resolution transmission electron microscopy (HR-TEM), scanning probe microscopy (SPM), scanning tunneling microscopy (STM) and atomic force microscopy (AFM) techniques [13]. The third characteristic is a result of the developments of various nanofabrication techniques such as nanoimprint lithography (NIL) using electron beams or X-rays and due to a physical phenomenon known as ''quantum confinement'' effect [14]. The developments in nanotechnology research have progressively increased, mainly due to new and desirable properties of nanomaterials.…”
Section: The Nano Revolutionmentioning
confidence: 99%
“…It is a micro biochemical analysis system of molecular microarray. It uses mechanical arm sampling technology or microelectronic lithography technology to construct up to tens of thousands Frontiers in Bioengineering and Biotechnology frontiersin.org of different probes on the surface of a certain volume of the solid carrier to detect a variety of biological components (Li et al, 2013;Azizipour et al, 2020;Aladese and Jeong, 2021;Tahir et al, 2021). The biochip technology has the advantages such as diversification, high throughput, short detection time, and portability.…”
Section: Biochip Technologymentioning
confidence: 99%
“…[4][5][6] The stamps may be re-used many times, which makes roller-based NIL an interesting and versatile technology for cost-effective volume manufacturing. 7 The patterning method can be used to fabricate functional layers or to enhance the optical or mechanical properties of a substrate. Applications can be found in, for example, anti-reflection or light-trapping films for displays and solar panels, 8,9 optical waveguides for augmented reality, 10 drag reduction films for aviation and shipping, 11,12 antifouling surfaces, 13,14 and many more.…”
Section: Introductionmentioning
confidence: 99%