Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology

Wang, Yuelin; Li, Tie; Yang, Huang‐Hao

doi:10.1098/rsta.2012.0315

Cited by 8 publications

(7 citation statements)

References 71 publications

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“…Silicon nanowires (SiNWs) are a versatile functional material, widely studied and employed as, for example, solar cells [1][2][3][4][5], battery anodes [6,7], microelectromechanical systems (MEMS) [8], chemical and biosensors [9][10][11][12][13][14], thermoelectric harvesters [15][16][17], and transistors [18][19][20], due to changes in materials properties in the micro-and nanostructured size regime [21][22][23][24][25][26]. For transistors, SiNWs provide opportunity for gate-all-around structures, which improve the electrostatic control of the conduction channel, thereby enhancing performance and lowering power consumption.…”

Section: Introductionmentioning

confidence: 99%

Strain and thermal conductivity in ultrathin suspended silicon nanowires

et al. 2017

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We report on the uniaxial strain and thermal conductivity of well-ordered, suspended silicon nanowire arrays between 10 to 20 nm width and 22 nm half-pitch, fabricated by extreme-ultraviolet (UV) interference lithography. Laser-power-dependent Raman spectroscopy showed that nanowires connected monolithically to the bulk had a consistent strain of ∼0.1%, whereas nanowires clamped by metal exhibited variability and high strain of up to 2.3%, having implications in strain engineering of nanowires. The thermal conductivity at room temperature was measured to be ∼1 W/m K for smooth nanowires and ∼0.1 W/m K for rougher ones, similar to results by other investigators. We found no modification of the bulk properties in terms of intrinsic scattering, and therefore, the decrease in thermal conductivity is mainly due to boundary scattering. Different types of surface roughness, such as constrictions and line-edge roughness, may play roles in the scattering of phonons of different wavelengths. Such low thermal conductivities would allow for very efficient thermal energy harvesting, approaching and passing values achieved by state-of-the-art thermoelectric materials.

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Section: Introductionmentioning

confidence: 99%

Strain and thermal conductivity in ultrathin suspended silicon nanowires

et al. 2017

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“…For the 〈111〉 wafer, the parallelogram structure was formed by following the DRIE etch with a wet anisotropic potassium hydroxide (KOH) etch. The anisotropic nature of the etch converts the rectangular structure into a parallelogram crosssection with an angle of slope of 70.5°as defined by the crystalline planes [20]. The top view of the fabricated rectangular and parallelogram moulds are shown in figures 7(a) and (b), respectively.…”

Section: Fabricationmentioning

confidence: 99%

Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing

Shi

Luo

Zhu

et al. 2019

Smart Mater. Struct.

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A ferroelectret is typically a charge-storing cellular foam that demonstrates excellent piezoelectric properties making them potentially suitable for both sensing and energy harvesting applications. In this work we developed a numerical finite element analysis (FEA) model to describe ferroelectret materials and to further improve their piezoelectric properties. Using this FEA model, ferroelectret materials with rectangular and parallelogram void structure were designed and then fabricated by casting polydimethysiloxane (PDMS) in microfabricated silicon moulds. The piezoelectric properties and energy harvesting output of the fabricated PDMS ferroelectrets were both simulated and evaluated experimentally. For a single layer PDMS parallelogram void structure, the predicted piezoelectric coefficient d 33 from the ANSYS simulations is around 320 pC N −1 . The fabricated PDMS ferroelectret has a low Young's modulus of 670 kPa and a piezoelectric coefficient of 240 pC N −1 . A maximum d 33 of 520 pC N −1 was observed in a multilayer ferroelectret structure. When applying compressive forces simulating a footstep, the material demonstrated an output power of 2.73 μW when connected to a 65 MΩ resistive load.

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“…Individual nanotubes can be utilised to fabricate transistors and the connections between transistors in integrated circuits because of their capability to act as either metallic-or semi-conductors [80,81]. This is highly advantageous as the miniaturisation of conventional metal oxide semiconductors silicon transistors are fast approaching fundamental physical limits [82,83]. The potential implementation of CNTbased circuits affords the potential continued miniaturisation of transistor dimensions is an essential factor for improved integrated circuit performance and the potential implementation of CNT -based circuits [83].…”

Section: Introductionmentioning

confidence: 99%

“…This is highly advantageous as the miniaturisation of conventional metal oxide semiconductors silicon transistors are fast approaching fundamental physical limits [82,83]. The potential implementation of CNTbased circuits affords the potential continued miniaturisation of transistor dimensions is an essential factor for improved integrated circuit performance and the potential implementation of CNT -based circuits [83].…”

Section: Introductionmentioning

confidence: 99%

Carbon nanomaterials and their application to electrochemical sensors: a review

Power¹,

Gorey²,

Chandra³

et al. 2018

Nano Online

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Carbon has long been applied as an electrochemical sensing interface owing to its unique electrochemical properties. Moreover, recent advances in material design and synthesis, particularly nanomaterials, has produced robust electrochemical sensing systems that display superior analytical performance. Carbon nanotubes (CNTs) are one of the most extensively studied nanostructures because of their unique properties. In terms of electroanalysis, the ability of CNTs to augment the electrochemical reactivity of important biomolecules and promote electron transfer reactions of proteins is of particular interest. The remarkable sensitivity of CNTs to changes in surface conductivity due to the presence of adsorbates permits their application as highly sensitive nanoscale sensors. CNT-modified electrodes have also demonstrated their utility as anchors for biomolecules such as nucleic acids, and their ability to diminish surface fouling effects. Consequently, CNTs are highly attractive to researchers as a basis for many electrochemical sensors. Similarly, synthetic diamonds electrochemical properties, such as superior chemical inertness and biocompatibility, make it desirable both for (bio) chemical sensing and as the electrochemical interface for biological systems. This is highlighted by the recent development of multiple electrochemical diamond-based biosensors and bio interfaces.Keywords: bio sensors; carbon nanomaterials; carbon nanotubes; electrochemical sensing; synthetic diamond Users without a subscription are not able to see the full content. Please, subscribe or login to access all content.

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Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology

Cited by 8 publications

References 71 publications

Strain and thermal conductivity in ultrathin suspended silicon nanowires

Strain and thermal conductivity in ultrathin suspended silicon nanowires

Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing

Carbon nanomaterials and their application to electrochemical sensors: a review

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