2011
DOI: 10.1039/c1nr10349k
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Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition

Abstract: Investment into photovoltaic (PV) research has accelerated over the past decade as concerns over energy security and carbon emissions have increased. The types of PV technology in which the research community is actively engaged are expanding as well. This review focuses on the burgeoning field of atomic layer deposition (ALD) for photovoltaics. ALD is a self-limiting thin film deposition technique that has demonstrated usefulness in virtually every sector of PV technology including silicon, thin film, tandem,… Show more

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Cited by 159 publications
(122 citation statements)
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“…[1][2][3] Consisting of a series of self-limited, saturated reactions, ALD offers an unrivaled ability to deposit thin, conformal fi lms with fi ne control over fi lm thickness and uniformity. [4][5][6] These advantages have been successfully leveraged to begin to address some of the most challenging problems for the photoelectrochemical (PEC) splitting of water, a process in which water is converted to oxygen and hydrogen that can later be used as fuel.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] Consisting of a series of self-limited, saturated reactions, ALD offers an unrivaled ability to deposit thin, conformal fi lms with fi ne control over fi lm thickness and uniformity. [4][5][6] These advantages have been successfully leveraged to begin to address some of the most challenging problems for the photoelectrochemical (PEC) splitting of water, a process in which water is converted to oxygen and hydrogen that can later be used as fuel.…”
Section: Introductionmentioning
confidence: 99%
“…A typical metal-oxide ALD process consists of alternating exposure of a surface to a metal-organic precursor and to an oxidizing agent as the co-reactant. With the maturing of ALD technology, and with the exploration of novel applications in renewable energy technologies, 3,4 there is increasing interest in ALD processes that go beyond the deposition of binary materials to allow for the synthesis of alloyed, doped, ternary, or quaternary materials. 5,6 These multi-element materials are typically deposited by combining the cycles of two or more binary ALD processes in a so-called supercycle.…”
Section: Introductionmentioning
confidence: 99%
“…2 Recently, ALD has raised interest from new application areas, such as photovoltaics and organic electronics. Applications where ALD has displayed added value include surface passivation layers in crystalline silicon solar cells, 3 buffer layers in CuInGa(Se,S) (CIGS) as an alternative to chemical bath deposition (CBD) CdS, 3 and moisture diffusion barrier layers for OLEDs and thin film photovoltaics. 4 These applications; however, require high-throughput and low-cost production techniques to make them economically viable.…”
Section: Introductionmentioning
confidence: 99%