2008
DOI: 10.1364/ao.47.006334
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Nanodisplacement measurement using spectral shifts in a white-light interferometer

Abstract: We report a novel experimental method to measure nanometer displacements using wavelength shifts of spectral peaks around spectral switch or singular phase points in the interference spectra due to temporal correlation in a Michelson interferometer illuminated by a broadband white-light source. Dramatic changes in the spectral characteristics are recorded as a function of path difference between the interfering beams around the spectral switch position. These are then compared with measurements far from it in … Show more

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Cited by 22 publications
(12 citation statements)
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“…Two-beam interferometers are often used in practical metrology systems because they can ensure displacement measurement traceability [24]. Among the different available configurations, the Michelson interferometer is adequate for many practical applications [25]. By considering a sinusoidal input phase shift described by Δϕt x sinω s t ϕ s , where the frequency ω s (rad∕s) is known, x (rad) is the unknown modulation index, and ϕ s (rad) is a random initial phase, the photodetected voltage at the output of a homodyne Michelson interferometer can be expanded in Fourier series, resulting in [18] …”
Section: Pernick Methodsmentioning
confidence: 99%
“…Two-beam interferometers are often used in practical metrology systems because they can ensure displacement measurement traceability [24]. Among the different available configurations, the Michelson interferometer is adequate for many practical applications [25]. By considering a sinusoidal input phase shift described by Δϕt x sinω s t ϕ s , where the frequency ω s (rad∕s) is known, x (rad) is the unknown modulation index, and ϕ s (rad) is a random initial phase, the photodetected voltage at the output of a homodyne Michelson interferometer can be expanded in Fourier series, resulting in [18] …”
Section: Pernick Methodsmentioning
confidence: 99%
“…To reach L 1 and L 2 in the both measurement steps as close as possible, the same mirror displacements from a position with the zero OPD are adjusted. The zero OPD in the interferometer is reached when the interference spectrum coincides with the reference spectrum [18]. We have revealed that this simple procedure enables us to adjust | ∆L |< 200 nm.…”
Section: Resultsmentioning
confidence: 86%
“…The conclusion drawn from the above is that the measurement error mostly depends on the SNR and is inversely proportional to the SNR. One of the reasons for the rapid estimated error increase for longer distances can also lie in the fact that the maximal possible distance, which can be measured with this measurement setup, is limited with the wavelength sampling period of the used optical spectrometer [11].…”
Section: Resultsmentioning
confidence: 99%