2004
DOI: 10.1063/1.1842352
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Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling

Abstract: In this letter, we describe the on-demand dispensing of single liquid droplets with volumes down to a few attoliters and submicrometric spacing. This dispensing is achieved using a standard atomic force microscope probe, with a 200 nm aperture at the tip apex, opened by focused ion beam milling. The inside of the tip is used as reservoir for the liquid. This maskless dispensing, realized in ambient environment, permits the direct creation of droplet arrays. Nanoparticles, suspended in the liquid, were organize… Show more

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Cited by 110 publications
(96 citation statements)
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References 11 publications
(6 reference statements)
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“…More recently, such contact methods have been extended to spotting of DNA microarrays 15,16 and the utilization of AFM tips for transfer of volumes in the attoliter range. [17][18][19][20] From the perspective of microfluidic integration, it would be ideal if all fluidic processes, such as dispensing, routing, mixing, activation and quenching of chemical reactions, could be implemented by utilizing a single tunable external mechanism. It has been demonstrated, for example, that ionic or electrolytic solutions can be mobilized and dispensed along a surface by the technique known as electrowetting.…”
Section: Introductionmentioning
confidence: 99%
“…More recently, such contact methods have been extended to spotting of DNA microarrays 15,16 and the utilization of AFM tips for transfer of volumes in the attoliter range. [17][18][19][20] From the perspective of microfluidic integration, it would be ideal if all fluidic processes, such as dispensing, routing, mixing, activation and quenching of chemical reactions, could be implemented by utilizing a single tunable external mechanism. It has been demonstrated, for example, that ionic or electrolytic solutions can be mobilized and dispensed along a surface by the technique known as electrowetting.…”
Section: Introductionmentioning
confidence: 99%
“…The cantilevers have been produced using standard microfabrication technique, whereas, the nanoaperture, shown in Fig. 3, has been fabricated using FIB technique [10]. Square and circular apertures with dimensions down to 80 nm have been drilled into the tip apex of the hollow cantilever, which nicely illustrates that FIB technique is, in contrast to standard fabrication methods, not limited to flat surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…A set of technologies are available for producing such nanoarrays, e.g. atomic force microscopy (AFM) [25], dip-pen nanolithography (DPN) [26], nanofountain probe [27,28], nanoimprint lithography [16], and various nanodispensers [20,22,29]. Albeit successful, these nanoarray layouts have been found to be associated with a set of key methodological shortcomings.…”
Section: Introductionmentioning
confidence: 99%