Nanocomposite TiC/a–C:H hard coatings deposited by reactive PVD

Zehnder, Thomas; Patscheider, Jörg

doi:10.1016/s0257-8972(00)00888-4

Cited by 249 publications

(105 citation statements)

References 23 publications

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“…The disordering effect gives rise to either the shift of the G peak position for lower frequencies or its broadening [18,19]. Similar behaviour was found for DLC films alloyed with Ti and Si [4][5][6].…”

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confidence: 69%

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How can H content influence the tribological behaviour of W-containing DLC coatings

Silva

Branco²,

Cavaleiro

2009

Solid State Sciences

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a b s t r a c tIn this paper, the influence of the addition of W and H to pure DLC coatings on the structural, mechanical and tribological properties will be presented. The coatings were deposited by r.f. magnetron sputtering from a C target embedded with different numbers of W pellets. Working in non-reactive or reactive atmosphere allowed to deposit H-free or H-containing coatings, respectively, on steel and Si substrates. A Cr adhesion interlayer was interposed between the films and the substrate. Films with W content from 0 to 12 at.% and H incorporated up to a maximum value close to 40 at.% were deposited. All coatings had an amorphous structure, although vestiges of crystallinity could be detected in W-containing films. The addition of W led to a significant hardening of the DLC coating (from w10 to 18 GPa); inversely, with H incorporation the hardness drop down to values even lower than that of pure DLC films. It was possible to establish a good correlation between the hardness and the residual stresses. In spite of decreasing friction and wear coefficients when alloying DLC with W, almost no difference was found among the W-DLC films whatever the W content was. A similar trend was achieved with the H addition. However, in this case a decrease in the friction coefficient was registered whereas the wear rate increased. The best performance concerning the friction was obtained for an H-containing coating (0.05) whereas, for the wear resistance, H-free W-DLC films were better performing (0.3 Â 10 À16 m 3 N À1 m À1 ).

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confidence: 69%

“…However, due to the peculiar structure of DLC, with C atoms aggregated in an amorphous phase with different hybridization states, the films can reach very high compressive residual stress that limit their extensive application [1][2][3]. In order to overcome this problem, DLC films have been doped with metallic elements [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

How can H content influence the tribological behaviour of W-containing DLC coatings

Silva

Branco²,

Cavaleiro

2009

Solid State Sciences

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“…By tuning the TiC grain size and fraction of a-C matrix, the properties can be controlled as the matrix phase increases the toughness of the material and softens the nanocomposite compared to pure carbides but also provides a source of solid lubricant. [2][3][4][5][6][7][8] The nc-TiC has a NaCl crystal structure and its bonding is a mixture of covalent, ionic and metallic bonds where the covalent contribution consists of Ti e g -C 2p ͑pd ͒, Ti t 2g -C 2p ͑pd ͒, and Ti-Ti t 2g ͑dd ͒ bonds, 9 which are all found in the valence band.…”

Section: Introductionmentioning

confidence: 99%

“…8,10,11 Core-level C 1s XPS measurements of TiC are known to exhibit two different spectral components originating from C-C and C-Ti bonding. The spectral component of the C-Ti bonding has a rather large ͑ϳ3 eV͒ chemical shift toward lower binding energy in comparison to the C-C component in a-C, which is a signature of electronic charge transfer from Ti to C. For the Ti 2p core levels, the chemical shift of the XPS peaks of TiC is small compared to the large shift at the C 1s core level.…”

Section: Introductionmentioning

confidence: 99%

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

et al. 2009

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The electronic structure of nanocrystalline ͑nc-͒ TiC/amorphous C nanocomposites has been investigated by soft x-ray absorption and emission spectroscopy. The measured spectra at the Ti 2p and C 1s thresholds of the nanocomposites are compared to those of Ti metal and amorphous C. The corresponding intensities of the electronic states for the valence and conduction bands in the nanocomposites are shown to strongly depend on the TiC carbide grain size. An increased charge transfer between the Ti 3d-e g states and the C 2p states has been identified as the grain size decreases, causing an increased ionicity of the TiC nanocrystallites. It is suggested that the charge transfer occurs at the interface between the nanocrystalline-TiC and the amorphous-C matrix and represents an interface bonding which may be essential for the understanding of the properties of nc-TiC/amorphous C and similar nanocomposites.

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“…Nanocomposite coatings consisting of different bonding structure have possibilities of synthesizing a surface protection layer with an unusual combination of mechanical and tribological properties such as high hardness and toughness, superior wear resistance and low frictions. 2) To attain this goal, TiC/a-C, [3][4][5][6] TiAlN/C or CrAlN/C coatings [7][8][9][10][11][12][13][14][15] have been prepared by various methods, including arc ion plating (AIP), closed field unbalanced magnetron sputtering (CFUBMS), plasma enhanced chemical vapor deposition (PECVD). However, only a limited amount of research on TiAlN/a-C coatings prepared in the mixture of Ar and N 2 gases without hydrocarbon gas has been conducted.…”

Section: Introductionmentioning

confidence: 99%

Microstructure and Properties of TiAlN/a-C Nanocomposite Coatings Prepared by Reactive Sputtering

et al. 2010

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TiAlN/a-C nano-composite coatings were synthesized by a reactive co-sputtering process to investigate the effects of sputtering conditions on the microstructure and mechanical properties. Coating films were deposited on square plates of Si and high speed steel (ANSI M2) by the cosputtering of TiAl (pulsed-d.c. sputtering) and C (d.c. sputtering) targets using a ''Facing Target-type Sputtering'' system at an atmosphere with a mixture of Ar and N 2 but without hydrocarbon gas. The structure of the coatings was investigated by means of XRD, XPS and HRTEM with GIF (Gatan Imaging Filter). Mechanical properties of coating films were measured by a submicron indentation system. Though TiAlN and a-C coatings showed hardness of about 32 and about 10 GPa, respectively, TiAlN/a-C coatings containing 4.6 at% of C showed higher hardness of 43 GPa. The energy filter images depicted that a change of contrast in the zero-loss image corresponded to nanometer-size of Ti agglomerates in Ti map. C1s spectrum in XPS analysis revealed that carbon in the coatings was bounded as C-C and C-N without bonding of Ti-C or Al-C. These results indicated that the TiAlN/a-C nano-composite coatings consisted of complicated mixture of nanocrystalline Ti-Al-N phase and a-C phase (including C-N bonding).

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Nanocomposite TiC/a–C:H hard coatings deposited by reactive PVD

Cited by 249 publications

References 23 publications

How can H content influence the tribological behaviour of W-containing DLC coatings

How can H content influence the tribological behaviour of W-containing DLC coatings

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

Microstructure and Properties of TiAlN/a-C Nanocomposite Coatings Prepared by Reactive Sputtering

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