Nano-Positioning System Using Linear Ultrasonic Motor with “Shaking Beam”

Borodin, Sergey; Kim, Jeong-Do; Kim, Hyun-Jai; Vasiljev, Piotr; Yoon, Seok Jin

doi:10.1023/b:jecr.0000037722.27973.d3

Cited by 17 publications

(7 citation statements)

References 2 publications

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“…Resonance-type linear piezoelectric motors include a type of linear motor based on "shaking beam" principle. This motor is composed of two piezoelectric vibrators with a phase difference of 90 ∘ to cause two-phase longitudinal vibration, the coupling effect of which produces an elliptical trajectory at the protruding section [10,11]. This motor type can be developed with two Langevin-type transducers or a pair of piezoelectric ceramics and has simple structure, easy processing, and low cost.…”

Section: Introductionmentioning

confidence: 99%

Working Mechanism of Nonresonance Friction in Driving Linear Piezoelectric Motors with Rigid Shaking Beam

Chen

Huang

et al. 2018

Mathematical Problems in Engineering

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A kind of nonresonance shaking beam motors is proposed with the advantages of simple structure, easy processing, and low cost due to its wide application prospects in precision positioning technology and precision instruments. The normal vibration model between the stator and slider is divided into contact and noncontact types to investigate the nonresonance friction drive principle for this motor. The microscopic kinematics model for stator protruding section and the interface friction model for motor systems during both operating stages are established. Accordingly, the trajectory of the stator protruding section consists of two different elliptical motions, which differ from those of resonance-type motors. The output characteristic of the nonresonance shaking beam motor is proposed under steady working conditions with reference to the research method of standing-wave-type ultrasonic motors. Numerical analysis is used to simulate the normal vibration and mechanical output characteristics of the motor. Experimental and theoretical data fitting validates the numerical analysis results and allows the future optimization of nonresonance-type motors.

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Section: Introductionmentioning

confidence: 99%

Working Mechanism of Nonresonance Friction in Driving Linear Piezoelectric Motors with Rigid Shaking Beam

Chen

Huang

et al. 2018

Mathematical Problems in Engineering

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“…The two transducers form an angle or a parallel hinge. When the two transducers are excited with a 90degree temporal phase difference, an elliptic motion is generated at the tip of the angle or hinge [9][10][11][12][13]. These three motor types are complicated because of the separate slider and stator.…”

Section: Introductionmentioning

confidence: 99%

A hollow cylindrical linear nut-type ultrasonic motor

Chen

Zhou

2017

mech

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“…It is difficult to develop a position control system because of size restrictions. To control the precise position of the actuator, high resolution sensors, which are commonly large and expensive, are required [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Control of Tiny Ultrasonic Linear Actuator Using Magneto-resistive Sensor for Camera Module

Jung

Kang

Kim

et al. 2009

Electric Power Components and Systems

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This article presents a control method for a tiny ultrasonic linear actuator for a camera module. The actuator is operated by a smooth impact driving method and an inertia displacement principle, and the structure of the actuator is very simple and lightweight. To precisely control the actuator, an actuator driver circuit has been developed that uses a small and inexpensive magneto-resistive sensor. The magneto-resistive sensor measures the changing magnetic field from a magnet attached to a mobile element and has a period of 400 m, which is scaled by 400 divisions, resulting in 1 m resolution. A proportional-integral-derivative control is used for controlling precise position. Finally, to verify the movement characteristics of the tiny ultrasonic linear actuator using a magneto-resistive sensor, a laser Doppler vibrometer (Polytec) was used Generally, the autofocus function of a camera module needs a 10 m resolution with a 1-mm stroke. The experimental results show that the actuator with the magneto-resistive sensor is suitable for the camera autofocus function.

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Nano-Positioning System Using Linear Ultrasonic Motor with “Shaking Beam”

Cited by 17 publications

References 2 publications

Working Mechanism of Nonresonance Friction in Driving Linear Piezoelectric Motors with Rigid Shaking Beam

Working Mechanism of Nonresonance Friction in Driving Linear Piezoelectric Motors with Rigid Shaking Beam

A hollow cylindrical linear nut-type ultrasonic motor

Control of Tiny Ultrasonic Linear Actuator Using Magneto-resistive Sensor for Camera Module

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