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The existing nano-positioning stages are driven by the piezoelectric ceramics, which have features of high accuracy and resolution, but the traditional positioning stage could not meet the requirement of large working space because the displacement of the piezoelectric ceramics is only tens of microns. To solve the contradiction between high accuracy and large working space, a novel non-resonant piezoelectric linear actuator, which adopted the two parallel v-shaped stators as the double driving feet, was proposed, and both its working principle and structure were discussed in detail. The actuator was used to drive the positioning stage directly to obtain the performance of nano-positioning and large working stroke. The experiment results show that the resolution of the actuator is 0.015 mm, and its stable maximum motion speed is 17.4 mm/s, while the degree-offreedom of step resolution of teach nano-positioning stage is 0.018 mm, 0.016 mm, and 0.3 mrad, respectively. Compared with the traditional positioning stage, the nano-positioning stage driven by the actuators directly also has excellent working stroke. The key performance of both high resolution and large working stroke of the nano-positioning stage was realized based on different motion modes of only one piezoelectric actuator.

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Nowadays, piezoelectric linear actuators draw wide attention of researchers around world as its advantages of simple structure, high precision and rapid response. To improve the performance of the non-resonant piezoelectric motor, a symmetric piezoelectric linear motor driven by double-foot is studied in the paper. The vibration model of the stator is established based on the structure and the working mechanism of motor. Then guide mechanism and preload device is designed and a prototype is fabricated to verify the feasibility of structure. The performances of motor under different driving signal are tested in experiment. By applying three-phase square-triangular waves signal and four-phase sine waves signal of peak to peak value 100 V with 50 V offset and frequency of 100 Hz, the speed of prototype reaches 733 μm/s and 667 μm/s and the maximum thrust is 8.34 N and 6.31 N respectively.