“…Metal organic decomposition (MOD) method is a promising one to prepare magnetic garnet film, because it is a simple fabrication method which is composed of spin coating of the MOD solutions ( 12 thin films have been fabricated on (111) oriented gadolinium gallium garnet (GGG) single crystal substrates [9,10,11,12,13,14,15], and glass substrates [16]. In order to apply Bi:GdIG or Bi:YIG thin films in Si/SiO 2 based waveguide optical isolators [17,18,19] and MOSLMs [7], it is required that Bi:GdIG thin films are prepared on glass substrates or SiO 2 thin films. Since the MOD method enables it to prepare Bi:GdIG/Bi:YIG thin films by spin-coating and annealing process, it is possible to prepare these magnetic garnet thin films on the specific area in a substrate with different levels, such as optical waveguides.…”