2012
DOI: 10.1364/oe.20.018440
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MZI optical isolator with Si-wire waveguides by surface-activated direct bonding

Abstract: We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8π and an optical isolation of 18 dB are obtained at a wavelengt… Show more

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Cited by 67 publications
(51 citation statements)
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“…6 was 8 μm (SOI core: 340 nm × 900 nm), which is still a resolution that is easily achieved with standard photolithography. Importantly, with a Stokes vector angle of 0.83π, we deduce a maximum isolation ratio of −11 dB, which is similar to ratios obtained with other first reports of new TM-mode isolator designs 1, 5, 6, 30 .
Figure 6Performance of 340 nm SOI FR isolator with seedlayer-free Bi:TIG claddings. (top) The Stokes vector angle of opposite magnetic saturation, where a peak relative angle of 0.83π is observed.
…”
Section: Device Measurementssupporting
confidence: 84%
“…6 was 8 μm (SOI core: 340 nm × 900 nm), which is still a resolution that is easily achieved with standard photolithography. Importantly, with a Stokes vector angle of 0.83π, we deduce a maximum isolation ratio of −11 dB, which is similar to ratios obtained with other first reports of new TM-mode isolator designs 1, 5, 6, 30 .
Figure 6Performance of 340 nm SOI FR isolator with seedlayer-free Bi:TIG claddings. (top) The Stokes vector angle of opposite magnetic saturation, where a peak relative angle of 0.83π is observed.
…”
Section: Device Measurementssupporting
confidence: 84%
“…A Ce:YIG layer was grown on an SGGG substrate through a sputter epitaxial growth technique. It should be noted that since the evanescent field penetrating the Ce:YIG layer is responsible for the magneto-optical phase shift, the thickness of intermediate layer between the silicon and garnet must be stringently controlled in order to obtain the desired magneto-optical phase shift [45]. …”
Section: Mzi Isolatormentioning
confidence: 99%
“…Metal organic decomposition (MOD) method is a promising one to prepare magnetic garnet film, because it is a simple fabrication method which is composed of spin coating of the MOD solutions ( 12 thin films have been fabricated on (111) oriented gadolinium gallium garnet (GGG) single crystal substrates [9,10,11,12,13,14,15], and glass substrates [16]. In order to apply Bi:GdIG or Bi:YIG thin films in Si/SiO 2 based waveguide optical isolators [17,18,19] and MOSLMs [7], it is required that Bi:GdIG thin films are prepared on glass substrates or SiO 2 thin films. Since the MOD method enables it to prepare Bi:GdIG/Bi:YIG thin films by spin-coating and annealing process, it is possible to prepare these magnetic garnet thin films on the specific area in a substrate with different levels, such as optical waveguides.…”
Section: Introductionmentioning
confidence: 99%
“…This is a great advantage of the MOD method over conventional fabrication methods such as laser ablation and magnetron sputtering. However, it is not easy to fabricate Bi:GdIG thin films on glass substrates because of the differences in crystal structure and thermal expansion coefficient between Bi:GdIG/ Bi:YIG and glass substrate [17]. It is important to obtain magnetic garnet thin films having large FR and high magneto optical activity.…”
Section: Introductionmentioning
confidence: 99%