Low-cost
and real-time formaldehyde (HCHO) monitoring is of great
importance due to its volatility, extreme toxicity, and ready accessibility.
In this work, a low-cost and integrated microelectromechanical system
(MEMS) HCHO sensor is developed based on SnO2 multishell
hollow microspheres loaded with a bimetallic PdPt (PdPt/SnO2-M) sensitizer. The MEMS sensor exhibits a high sensitivity to HCHO
((R
a/R
g –
1) % = 83.7 @ 1 ppm), ultralow detection limit of 50 ppb, and ultrashort
response/recovery time (5.0/7.0 s @ 1 ppm). These excellent HCHO sensing
properties are attributed to its unique multishell hollow structure
with a large and accessible surface, abundant interfaces, suitable
mesoporous structure, and synergistic catalytic effects of bimetal
PdPt. The well-defined multishell hollow structure also shows fascinating
capacities as good hosts for noble metal loading. Therefore, PdPt
bimetallic nanoparticles can be employed to construct a synergistic
sensitizer with a high content and good dispersity on this multishell
hollow structure, further exhibiting a reduced working temperature
and ultrasensitive detection of HCHO. This PdPt/SnO2-M-based
MEMS sensor presents a unique and highly sensitive means to detect
HCHO, establishing its great promise for potential application in
environmental monitoring.